发明授权
- 专利标题: Bolometer including a reflective layer
- 专利标题(中): 测辐射计包括反射层
-
申请号: US09146254申请日: 1998-09-03
-
公开(公告)号: US06198099B1公开(公告)日: 2001-03-06
- 发明人: Dong Kyun Kim
- 申请人: Dong Kyun Kim
- 主分类号: G01J500
- IPC分类号: G01J500
摘要:
A infra-red bolometer includes an active matrix level, a support level, a pair of posts and an absorption level. The active matrix level includes a substrate having a pair of connecting terminals. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes an absorber with a reflective layer positioned at bottom surface thereof, a serpentine bolometer element surrounded by the absorber and an IR absorber coating formed top of the absorber. Since the reflective layer is attached at the bottom surface of the absorber, which will, in turn, eliminate the need for controlling the vertical distance between the absorption level and the active matrix level.
信息查询