发明授权
US06204196B1 Method of forming a film having enhanced reflow characteristics at low thermal budget
有权
在低热预算下形成具有增强的回流特性的膜的方法
- 专利标题： Method of forming a film having enhanced reflow characteristics at low thermal budget
- 专利标题（中）： 在低热预算下形成具有增强的回流特性的膜的方法
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申请号： US09190840申请日： 1998-11-12
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公开(公告)号： US06204196B1公开(公告)日： 2001-03-20
- 发明人: Gurtej Sandhu , Randhir P. S. Thakur
- 申请人： Gurtej Sandhu , Randhir P. S. Thakur
- 主分类号： B05D302
- IPC分类号： B05D302
摘要：
A method of forming a film having enhanced reflow characteristics at low thermal budget is disclosed, in which a surface layer of material is formed above a base layer of material, the surface layer having a lower melting point than the base layer. In this way, a composite film having two layers is created. After reflow, the surface layer can be removed using conventional methods.
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