发明授权
- 专利标题: Semiconductor light emitting device and method of manufacturing same
- 专利标题(中): 半导体发光器件及其制造方法
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申请号: US09178749申请日: 1998-10-27
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公开(公告)号: US06206962B1公开(公告)日: 2001-03-27
- 发明人: Satoru Kijima , Hiroyuki Okuyama
- 申请人: Satoru Kijima , Hiroyuki Okuyama
- 优先权: JP9-295940 19971028
- 主分类号: C30B2300
- IPC分类号: C30B2300
摘要:
An n-type cladding layer, the first guiding layer, an active layer, the second guiding layer, a p-type cladding layer, a backing layer, a contact layer, a superlattice layer and a cap layer are stacked in this order on an n-type substrate. The cap layer comprises p-type ZnTe and has a thickness of less than 10 nm. The contact layer is comprised of p-type ZnSe and the concentration of nitrogen added to the contact layer is in the range of 1 to 2×1018 cm−3. The backing layer comprises p-type ZnSSe mixed crystal and the concentration of nitrogen added to the backing layer is higher than that of the contact layer, in the range of 1 to 3×1018 cm−3. Before the corresponding Group II-VI compound semiconductor layers are grown by the MBE method, the temperature of cells is once increased. The operating voltage of the semiconductor light emitting device can be lowered by increasing the carrier concentrations of the Group II-VI compound semiconductor layers between the p-side electrode and the p-type cladding layer.
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