发明授权
US06210994B1 Process for forming an edge structure to seal integrated electronic devices, and corresponding device
有权
用于形成边缘结构以密封集成电子设备的过程以及相应的设备
- 专利标题: Process for forming an edge structure to seal integrated electronic devices, and corresponding device
- 专利标题(中): 用于形成边缘结构以密封集成电子设备的过程以及相应的设备
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申请号: US09534675申请日: 2000-03-24
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公开(公告)号: US06210994B1公开(公告)日: 2001-04-03
- 发明人: Camilla Calegari , Anna Carrara , Lorenzo Fratin , Carlo Riva
- 申请人: Camilla Calegari , Anna Carrara , Lorenzo Fratin , Carlo Riva
- 优先权: EP97830029 19970131
- 主分类号: H01L2131
- IPC分类号: H01L2131
摘要:
A process for the formation of a device edge morphological structure for protecting and sealing peripherally an electronic circuit integrated in a major surface of a substrate of semiconductor material. The electronic circuit is of the type that calls for formation above the major surface of at least one dielectric multilayer. The dielectric multilayer includes a layer of amorphous planarizing material having a continuous portion extending between two contiguous areas with a more internal first area and a more external second area in the morphological structure. The device edge morphological structure includes in the substrate an excavation on the side of the major surface at the more internal first area of the morphological structure in a zone in which is present the continuous portion of the dielectric multilayer.
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