发明授权
- 专利标题: Method for manufacturing group III-V compound semiconductor
- 专利标题(中): III-V族化合物半导体的制造方法
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申请号: US09127922申请日: 1998-08-03
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公开(公告)号: US06225195B1公开(公告)日: 2001-05-01
- 发明人: Yasushi Iyechika , Yoshinobu Ono , Tomoyuki Takada , Masaya Shimizu
- 申请人: Yasushi Iyechika , Yoshinobu Ono , Tomoyuki Takada , Masaya Shimizu
- 优先权: JP9-208865 19970804
- 主分类号: C30B2300
- IPC分类号: C30B2300
摘要:
A method for manufacturing a group III-V compound semiconductor represented by the general formula InxGayAlzN (where x+y+z=1, 0≦x≦1, 0≦y≦1, and 0≦z≦1) by metalorganic vapor phase epitaxy method is provided. The group III-V compound semiconductor has a semiconductor layer consisting of a p-type dopant-nondoped layer, and a semiconductor layer including a p-type dopant-doped layer. In the method, a reactor for growing the semiconductor layer consisting of a p-type dopant-nondoped layer and a reactor for doping a p-type dopant are mutually different.
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