发明授权
US06227519B1 Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate
失效
具有热可流动层的母模基板，其制造方法以及使用该母基板制作微探针头的方法
- 专利标题： Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate
- 专利标题（中）： 具有热可流动层的母模基板，其制造方法以及使用该母基板制作微探针头的方法
-
申请号： US09069290申请日： 1998-04-29
-
公开(公告)号： US06227519B1公开(公告)日： 2001-05-08
- 发明人: Takayuki Yagi , Tsutomu Ikeda , Yasuhiro Shimada
- 申请人： Takayuki Yagi , Tsutomu Ikeda , Yasuhiro Shimada
- 优先权： JP9-132882 19970507
- 主分类号： B29C3338
- IPC分类号： B29C3338
摘要：
A female mold substrate used for the production of a microprobe tip or probe detecting a tunneling current or weak force includes a substrate provided with a recess section and a heat-flowable layer having flowability by heat treatment formed on the substrate and covering the recess. The female mold substrate is made by forming a recess section on the top surface of a substrate and forming a heat-flowable layer on the top surface of the substrate including the recess section. A microprobe tip detecting a tunneling current or weak force is made by forming a tip material layer on the female mold substrate and transferring the tip of material layer onto another substrate.
信息查询
