发明授权
- 专利标题： Method of forming interlayer film
- 专利标题（中）： 形成中间膜的方法
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申请号： US09265232申请日： 1999-03-08
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公开(公告)号： US06232245B1公开(公告)日： 2001-05-15
- 发明人: Masaki Hara
- 申请人： Masaki Hara
- 优先权： JP8-190641 19960719; JP8-216996 19960819
- 主分类号： H07L2144
- IPC分类号： H07L2144
摘要：
A method of forming an interlayer film on a substrate with a plurality of patterns formed thereon wherein the interlayer film is deposited on the substrate by a process comprising a plurality of steps in each of which a portion of the film is deposited so as to have different fluidity with the same source material.
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