发明授权
- 专利标题: Semiconductor device provided with a field-effect transistor and method of manufacturing the same
- 专利标题(中): 具有场效晶体管的半导体装置及其制造方法
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申请号: US09413513申请日: 1999-10-06
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公开(公告)号: US06232640B1公开(公告)日: 2001-05-15
- 发明人: Masakazu Okada , Keiichi Higashitani
- 申请人: Masakazu Okada , Keiichi Higashitani
- 优先权: JP11-123899 19990430
- 主分类号: H01L2972
- IPC分类号: H01L2972
摘要:
A semiconductor device can reduce a leak current, and a manufacturing method can provide such a semiconductor device. A semiconductor device includes an isolating and insulating film formed on a main surface of a semiconductor substrate including a first conductivity type region, and also includes a field-effect transistor. The field-effect transistor includes a second conductivity type region neighboring to the isolating and insulating film, a gate electrode, a lower layer side wall film formed on a side surface of the gate electrode, an upper layer side wall film formed on the lower layer side wall film and containing a material different from that of the lower layer side wall film, and a high-melting-point metal silicide layer formed on the second conductivity type region. The upper surface of the isolating and insulating film is located at a level substantially equal to or lower than the main surface of the semiconductor substrate and higher than a junction boundary surface between the first and second conductivity type regions.
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