发明授权
US06236076B1 Ferroelectric field effect transistors for nonvolatile memory applications having functional gradient material 失效
具有功能梯度材料的非易失性存储器应用的铁电场效应晶体管

  • 专利标题: Ferroelectric field effect transistors for nonvolatile memory applications having functional gradient material
  • 专利标题(中): 具有功能梯度材料的非易失性存储器应用的铁电场效应晶体管
  • 申请号: US09301867
    申请日: 1999-04-29
  • 公开(公告)号: US06236076B1
    公开(公告)日: 2001-05-22
  • 发明人: Koji AritaCarlos A. Paz de Araujo
  • 申请人: Koji AritaCarlos A. Paz de Araujo
  • 主分类号: H01L2976
  • IPC分类号: H01L2976
Ferroelectric field effect transistors for nonvolatile memory applications having functional gradient material
摘要:
A nonvolatile nondestructible read-out ferroelectric FET memory comprising a semiconductor substrate, a ferroelectric functional gradient material (“FGM”) thin film, and a gate electrode. In one basic embodiment, the ferroelectric FGM thin film contains a ferroelectric compound and a dielectric compound. The dielectric compound has a lower dielectric constant than the ferroelectric compound. There is a concentration gradient of the ferroelectric compound in the thin film. In a second basic embodiment, the FGM thin film is a functional gradient ferroelectric (“FGF”), in which compositional gradients of ferroelectric compounds result in unconventional hysteresis behavior. The unconventional hysteresis behavior of FGF thin films is elated to an enlarged memory window in ferroelectric FET memories. FGM thin films are preferably formed using a liquid source MOD methods, preferably a multisource CVD method.
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