发明授权
- 专利标题: Semiconductor color image sensor
- 专利标题(中): 半导体彩色图像传感器
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申请号: US09325031申请日: 1999-06-03
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公开(公告)号: US06242730B1公开(公告)日: 2001-06-05
- 发明人: Shih-Yao Lin , Shu-Li Chen , Jeenh-Bang Yeh , Yuan-Sheng Chiang
- 申请人: Shih-Yao Lin , Shu-Li Chen , Jeenh-Bang Yeh , Yuan-Sheng Chiang
- 主分类号: H01L2700
- IPC分类号: H01L2700
摘要:
A semiconductor image sensor includes a metal layer formed on a semiconductor substrate. An oxide layer is disposed over the semiconductor substrate to cover the metal layer. A SOG is disposed on the oxide layer, a color filter is disposed on the SOG and a silicon-oxy-nitride layer is disposed thereon. By using the high transmittance of the SOG and the silicon-oxy-nitride layer, the blue light transmittance by the semiconductor image sensor is therefore enhanced.
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