发明授权
- 专利标题: Microscopic system equipt with an electron microscope and a scanning probe microscope
- 专利标题(中): 用电子显微镜和扫描探针显微镜显微镜系统
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申请号: US09136730申请日: 1998-08-19
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公开(公告)号: US06242737B1公开(公告)日: 2001-06-05
- 发明人: Hideaki Ohnishi , Yukihito Kondo , Kunio Takayanagi
- 申请人: Hideaki Ohnishi , Yukihito Kondo , Kunio Takayanagi
- 优先权: JP9-239139 19970821
- 主分类号: G01N1312
- IPC分类号: G01N1312
摘要:
The present invention is to provide a microscopic system by which a simultaneous observation at an ultra high vacuum condition by an electron microscope and by a scanning probe microscope is possible in an ultra high vacuum electron microscope chamber 9 equipped with an observation stage 3, to which an ultra high vacuum chamber 1 for a scanning probe microscope equipping with a scanning probe microscope holder 2 in which scanning probe microscope is contained and a specimen treatment chamber 5 possessing a specimen holder 4 on which a specimen is held are connected. Said each chamber of microscopic system can be separately exhausted to the ultra high vacuum level and the specimen holder and the scanning probe microscope holder can voluntarily be fixed to said observation stage and be removed from said observation stage.
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