公开(公告)号：US06590208B2

公开(公告)日：2003-07-08

申请号：US09766555

申请日：2001-01-19

申请人： James R. Massie

发明人： James R. Massie

IPC分类号： G01N1312

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q70/02

摘要： A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.

公开(公告)号：US06608306B1

公开(公告)日：2003-08-19

申请号：US09743202

申请日：2001-01-08

申请人： Masakazu Aono ,  Tomonobu Nakayama ,  Kazuya Terabe

发明人： Masakazu Aono ,  Tomonobu Nakayama ,  Kazuya Terabe

IPC分类号： G01N1312

CPC分类号： B82B3/00 ,  G01Q60/16 ,  Y10S977/861 ,  Y10S977/869 ,  Y10S977/875 ,  Y10S977/879

摘要： The invention provides a probe for use with a scanning tunneling microscope, a method of treating the probe, and a method of fabricating a nano-structure, which facilitates formation of a continuous nano-structure. The probe for the scanning tunneling microscope is formed of an Ag2S crystal having both ion conductivity and electron conductivity. Voltage and tunnel current are applied between the probe and a substrate in order to move movable Ag ions to thereby grow, on the tip end of the probe, a projection (mini chip) composed of Ag ions or Ag atoms. The polarity of the applied voltage is reversed after the growth of the projection in order to return the Ag ions or Ag atoms constituting the grown projection (mini chip) into the Ag2S crystal to thereby contract the projection. Thus, the probe can have a projection composed of Ag ions or Ag atoms and a regulated shape. Further, the movable ions or atoms of the mixed-conductive material are transferred onto the substrate so as to form a nano-structure on the substrate.

摘要翻译： 本发明提供了一种用于扫描隧道显微镜的探针，一种处理该探针的方法，以及一种有助于形成连续纳米结构的纳米结构的制造方法。 用于扫描隧道显微镜的探针由具有离子传导性和电子传导性的Ag 2 S晶体形成。 电压和隧道电流施加在探针和衬底之间，以移动可移动的Ag离子，从而在探针的尖端上生长由Ag离子或Ag原子组成的突起（微型芯片）。 在投影生长之后，施加电压的极性反转，以将构成生长的突起（微型芯片）的Ag离子或Ag原子返回到Ag2S晶体中，从而使投影收缩。 因此，探针可以具有由Ag离子或Ag原子组成的突起和调节形状。 此外，将混合导电材料的可移动离子或原子转移到衬底上，以在衬底上形成纳米结构。

公开(公告)号：US06242737B1

公开(公告)日：2001-06-05

申请号：US09136730

申请日：1998-08-19

申请人： Hideaki Ohnishi ,  Yukihito Kondo ,  Kunio Takayanagi

发明人： Hideaki Ohnishi ,  Yukihito Kondo ,  Kunio Takayanagi

IPC分类号： G01N1312

CPC分类号： G01Q30/02 ,  H01J2237/204 ,  H01J2237/28 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/864 ,  Y10S977/871

摘要： The present invention is to provide a microscopic system by which a simultaneous observation at an ultra high vacuum condition by an electron microscope and by a scanning probe microscope is possible in an ultra high vacuum electron microscope chamber 9 equipped with an observation stage 3, to which an ultra high vacuum chamber 1 for a scanning probe microscope equipping with a scanning probe microscope holder 2 in which scanning probe microscope is contained and a specimen treatment chamber 5 possessing a specimen holder 4 on which a specimen is held are connected. Said each chamber of microscopic system can be separately exhausted to the ultra high vacuum level and the specimen holder and the scanning probe microscope holder can voluntarily be fixed to said observation stage and be removed from said observation stage.

摘要翻译： 本发明提供一种微型系统，在具有观察台3的超高真空电子显微室9中，通过电子显微镜和扫描探针显微镜在超高真空条件下同时观察是可能的，其中 用于扫描探针显微镜的超高真空室1装备有其中包含扫描探针显微镜的扫描探针显微镜架2和具有其上保持有试样的试样保持器4的试样处理室5。 所述每个微观系统室可以分别耗尽到超高真空水平，并且样品架和扫描探针显微镜支架可以自愿地固定到所述观察台并从所述观察台移除。

公开(公告)号：US06825468B2

公开(公告)日：2004-11-30

申请号：US10612567

申请日：2003-07-02

申请人： Masamichi Oi ,  Tatsuya Asahata

发明人： Masamichi Oi ,  Tatsuya Asahata

IPC分类号： G01N1312

CPC分类号： H01J37/3056 ,  H01J37/244 ,  H01J37/304 ,  H01J2237/24455 ,  H01J2237/31744 ,  H01J2237/31749

摘要： A fine stencil structure correction device has a charged particle beam microscope lens-barrel which scans and corrects shapes of defect portions of a fine stencil structure sample using an etching or deposition function, and the fine stencil structure correction device further comprises transmitted beam detecting means for detecting a transmitted beam which is the charged particle beam penetrating the sample provided on a sample stage when the sample is scanned by the charged particle beam.

公开(公告)号：US06242736B1

公开(公告)日：2001-06-05

申请号：US09116319

申请日：1998-07-15

申请人： Akihiko Honma ,  Takeshi Umemoto ,  Akira Inoue

发明人： Akihiko Honma ,  Takeshi Umemoto ,  Akira Inoue

IPC分类号： G01N1312

CPC分类号： G01Q30/04 ,  Y10S977/85

摘要： A scanning probe microscope for scanning a probe needle in proximity to a surface of a sample in XY-axis directions while moving at least one of the probe and the sample in a Z-axis direction has a plurality of band-pass filters for passing a plurality of band-pass signals by extracting predetermined frequency bands different one another from a surface geometry signal output by a probe. An image memory stores the respective band-pass signals and corresponding positions on the sample surface, and a color image outputting device outputs a color image by treating each of the respective band-pass signals stored as image data in the image memory as different color data and combining the data. The plurality of band-pass signals includes a first band-pass signal having a first frequency range set to include only abrupt transitions in the sample surface and a second band-pass signal having a second frequency range set to include frequencies slightly outside the first frequency range so that abrupt transitions in geometry on the sample surface are represented by a first color in response to the first band-pass signal and areas directly adjacent the abrupt transitions on the sample surface are represented by a second color different from the first color.

摘要翻译： 扫描探针显微镜，用于在沿Z轴方向移动探头和样本中的至少一个的同时沿XY轴方向扫描样品表面附近的探针，具有多个带通滤波器，用于使 通过从由探针输出的表面几何信号中提取彼此不同的预定频带，来产生多个带通信号。 图像存储器将各个带通信号和相应的位置存储在样本表面上，并且彩色图像输出装置通过将作为图像数据存储的各个带通信号中的每一个作为不同的颜色数据进行处理来输出彩色图像 并组合数据。 多个带通信号包括具有第一频率范围的第一带通信号，其中第一频率范围被设置为仅包括采样表面中的突变，以及具有第二频率范围的第二带通信号，第二频带设置为包括稍微在第一频率之外的频率 范围，使得样品表面上的几何形状的突变过渡由第一颜色响应于第一带通信号表示，并且与样品表面上的突然跃迁直接相邻的区域由不同于第一颜色的第二颜色表示。