发明授权
- 专利标题: Piezoelectric resonator and method for fabricating the same
- 专利标题(中): 压电谐振器及其制造方法
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申请号: US09303682申请日: 1999-05-03
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公开(公告)号: US06243933B1公开(公告)日: 2001-06-12
- 发明人: Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
- 申请人: Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
- 优先权: JP8-094000 19960416
- 主分类号: H04R1700
- IPC分类号: H04R1700
摘要:
A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
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