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公开(公告)号：US06243933B1
公开(公告)日：2001-06-12
申请号：US09303682
申请日：1999-05-03
IPC分类号： H04R1700
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02031 , H03H9/0207 , H03H9/176 , Y10T29/42 , Y10T29/49004
摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要翻译： 对于两个压电单晶板制备具有反向畴的晶片，并且通过直接接合而没有任何粘合剂制备大约相同的厚度。 在晶片的两个主平面上形成驱动电极，具有反向的畴，以提供压电谐振器。 具有反极化结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，并且抑制具有反向偏振的畴的厚度的散射。 在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。 因此，以简单的方式抑制杂散模式。
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公开(公告)号：US5929555A
公开(公告)日：1999-07-27
申请号：US834207
申请日：1997-04-15
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02031 , H03H9/0207 , H03H9/176 , Y10T29/42 , Y10T29/49004
摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates 11 and 12 having about the same thickness as each other by using direct bonding without any adhesive. Then, driving electrodes 13 are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reverses polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要翻译： 通过使用没有任何粘合剂的直接粘合，为具有彼此具有大致相同厚度的两个压电单晶板11和12制备具有反向畴的晶片。 然后，驱动电极13形成在具有反向域的晶片的两个主平面上，以提供压电谐振器。 具有反转偏振结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，抑制具有反向偏振的畴的厚度的散射。 在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。 因此，以简单的方式抑制杂散模式。
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公开(公告)号：US06615465B2
公开(公告)日：2003-09-09
申请号：US09573542
申请日：2000-05-19
IPC分类号： H04R1700
CPC分类号： G01P15/0891 , G01L5/0052 , G01P1/127 , G01P15/0802 , G01P15/0922 , G01R31/2834 , G01R31/30 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49789
摘要： A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two opposing main surfaces. The piezoelectric element is formed by directly connecting one of the main surfaces of one of the at least two piezoelectric substrates with an opposing one of the main surfaces of another one of the at least two piezoelectric substrates. Supporters are provided to support the electromechanical transducer and are directly connected to the at least two piezoelectric substrates composing the piezoelectric element. Electrodes that extend continuously from the unconnected main surfaces of the at least two piezoelectric substrates composing the piezoelectric element to surfaces of the supporters are then formed.
摘要翻译： 一种用于制造包括具有压电元件的机电换能器的加速度传感器的方法包括提供至少两个压电基片，其中每个具有两个相对的主表面。 压电元件通过将至少两个压电基片之一的主表面中的一个直接连接到至少两个压电基片中另一个的相对的一个主表面而形成。 提供支撑器以支持机电换能器并且直接连接到构成压电元件的至少两个压电基板。 然后形成从构成压电元件的至少两个压电基板的未连接的主表面连续延伸到支撑体的表面的电极。
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4.发明授权Liquid jetting apparatus having a piezoelectric drive element directly bonded to a casing 失效液体喷射装置具有直接结合到壳体的压电驱动元件公开(公告)号：US06270202B1
公开(公告)日：2001-08-07
申请号：US09064848
申请日：1998-04-23
申请人： Akihiko Namba , Yoshihiro Tomita , Tetsuyoshi Ogura , Osamu Kawasaki , Masato Sugimoto , Katsumi Imada , Atsushi Komatsu , Kazuo Eda
发明人： Akihiko Namba , Yoshihiro Tomita , Tetsuyoshi Ogura , Osamu Kawasaki , Masato Sugimoto , Katsumi Imada , Atsushi Komatsu , Kazuo Eda
IPC分类号： B41J2045
CPC分类号： B41J2/1623 , B41J2/14282 , B41J2/1614 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1646 , B41J2202/03
摘要： A liquid jetting apparatus has a concave casing having an opened flat face, and a piezoelectric drive element for at least partly sealing the opened flat face to form a liquid reservoir to store a liquid, such as ink. The reservoir has a liquid injection port for injecting a liquid and a liquid jet port for jetting the stored liquid. The piezoelectric drive element is directly bonded to the open flat face.
摘要翻译： 液体喷射装置具有开口的平坦面的凹形外壳和用于至少部分地密封打开的平坦表面以形成液体储存器以储存诸如墨水的液体的压电驱动元件。 储存器具有用于喷射液体的液体注入口和用于喷射储存液体的液体喷射口。 压电驱动元件直接接合到开口平面上。
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公开(公告)号：US6098460A
公开(公告)日：2000-08-08
申请号：US727302
申请日：1996-10-08
IPC分类号： G01R31/26 , G01L5/00 , G01P1/12 , G01P15/08 , G01P15/09 , G01R31/28 , G01R31/30 , G01R31/317 , H01L21/66
CPC分类号： G01P15/0891 , G01L5/0052 , G01P1/127 , G01P15/0802 , G01P15/0922 , G01R31/2834 , G01R31/30 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49789
摘要： A small accelaration sensor which is highly sensitive over a large frequency region and which varies little in characteristics such as sensitivity. A piezoelectric element is formed by connecting two main faces of retangular LiNbO.sub.3 piezoelectric substrates, in which the polarization axes are directed oppositely. Supporters comprising LiNbO.sub.3 directly connected to one end of the piezoelectric element. Eletrodes of chromium-gold being 0.2 .mu.m are thick are successively connected to the two main faces of the piozoelectric element and to the supporters, thus to produce a cantilever structure bimorph electromechanical transducer.
摘要翻译： 一种小型加速传感器，在大频率区域内具有高灵敏度，灵敏度等特性变化不大。 压电元件通过连接偏振轴相对地指向的矩形LiNbO 3压电基板的两个主面而形成。 包含直接与压电元件的一端连接的LiNbO 3的支撑体。 铬 - 金的0.2微米厚的铁素体连续地连接到波氮元素的两个主面和支撑体上，从而产生悬臂结构双压电晶片机电换能器。
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公开(公告)号：US5994821A
公开(公告)日：1999-11-30
申请号：US978422
申请日：1997-11-25
CPC分类号： H01L41/094
摘要： Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.
摘要翻译： 矩形压电基板各自具有彼此相对的主表面，其厚度为50μm厚×1mm×8mm长，由铌酸锂（LiNbO 3）构成，直接接合在主表面上，使得它们的轴线 极化被设置在彼此相反的方向上，从而构成压电元件。 在压电元件的两个主表面上形成厚度为0.2μm，由铬镍制成的电极，从而形成双压电晶片式机电转换元件的精密位移控制致动器。 这种构造使得可以提供一种紧凑的精确位移控制致动器，其具有大的位移和极小的位移和共振频率等特性的变化。
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7.发明授权Ultrasonic motor with stator projections and at least two concentric rings of electrodes 失效具有定子突起和至少两个电极同心环的超声波马达
公开(公告)号：US4829209A
公开(公告)日：1989-05-09
申请号：US126105
申请日：1987-11-20
申请人： Osamu Kawasaki , Ritsuo Inaba , Akira Tokushima , Katsu Takeda
发明人： Osamu Kawasaki , Ritsuo Inaba , Akira Tokushima , Katsu Takeda
CPC分类号： H02N2/166
摘要： In an ultrasonic motor wherein an elastic travelling wave is excited in a vibrating stator comprising a piezoelectric element and an elastic element thereby to drive and a rotor which is disposed to touch the vibrating stator with pressure by friction forces, an ultrasonic motor having high efficiency is obtained. In the present invention, the above-mentioned vibrating stator is substantially disk-type, electrodes being provided to the piezoelectric element are disposed in a form of two sets of concentric circles having different phases with respect to each other in a circumferential direction in which the vibration is travelling, and have a constitution which excites the vibrating stator by flexural vibration modes of second order or higher in a radial direction and of third order or higher in the circumferential direction, and also, are designed so that at least mechanical impedances seen from each electrode become equal. By superimposing standing waves of the flexural vibration which are excited by those two sets of electrodes, the flexural vibration is made to travel in the circumferential direction, thereby to obtain a driving force.
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公开(公告)号：US06227051B1
公开(公告)日：2001-05-08
申请号：US09532027
申请日：2000-03-21
申请人： Tetsuro Otsuchi , Katsu Takeda , Katsunori Moritoki , Osamu Kawasaki , Junichi Kato , Kouji Kawakita , Hiroshi Kagata
发明人： Tetsuro Otsuchi , Katsu Takeda , Katsunori Moritoki , Osamu Kawasaki , Junichi Kato , Kouji Kawakita , Hiroshi Kagata
IPC分类号： G01P1509
CPC分类号： G01P15/0922 , G01P21/00
摘要： An acceleration sensor has a piezoelectric element which includes a piezoelectric member layer in which a plurality of piezoelectric members are stacked and electrodes which are disposed in major opposed surfaces of the piezoelectric member layer; and a support member for supporting the piezoelectric element, wherein some piezoelectric members of the piezoelectric member layer are polarized. The electrodes are disposed in both surfaces of the polarized piezoelectric members. Capacitors which are formed by the polarized piezoelectric members and the electrodes in both surfaces of the polarized piezoelectric members are connected parallel to each other.
摘要翻译： 一种加速度传感器具有压电元件，该压电元件包括堆叠有多个压电元件的压电元件层和设置在该压电元件层主要相对表面的电极; 以及用于支撑压电元件的支撑构件，其中压电构件层的一些压电构件被极化。 电极设置在极化压电部件的两个表面。 由极化压电部件形成的电容器和极化压电部件的两面的电极彼此平行地连接。
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公开(公告)号：US6050144A
公开(公告)日：2000-04-18
申请号：US89660
申请日：1998-06-03
申请人： Tetsuro Otsuchi , Katsu Takeda , Katsunori Moritoki , Osamu Kawasaki , Junichi Kato , Kouji Kawakita , Hiroshi Kagata
发明人： Tetsuro Otsuchi , Katsu Takeda , Katsunori Moritoki , Osamu Kawasaki , Junichi Kato , Kouji Kawakita , Hiroshi Kagata
CPC分类号： G01P15/0922 , G01P21/00
摘要： An acceleration sensor has a piezoelectric element which includes a piezoelectric member layer in which a plurality of piezoelectric members are stacked and electrodes which are disposed in major opposed surfaces of the piezoelectric member layer; and a support member for supporting the piezoelectric element, wherein some piezoelectric members of the piezoelectric member layer are polarized, the electrodes are disposed in the both surfaces of the polarized piezoelectric members, capacitors which are formed by the polarized piezoelectric members and the electrodes in the both surfaces of the polarized piezoelectric members are connected parallel to each other.
摘要翻译： 加速度传感器具有压电元件，该压电元件包括堆叠有多个压电元件的压电元件层和设置在该压电元件层的主要相对表面的电极; 以及用于支撑所述压电元件的支撑构件，其中所述压电构件层的一些压电构件被极化，所述电极设置在所述极化压电构件的两个表面中，所述极化压电构件形成的电容器和所述极化压电构件中的电极 极化压电元件的两个表面彼此平行地连接。
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公开(公告)号：US5448129A
公开(公告)日：1995-09-05
申请号：US261245
申请日：1994-06-14
CPC分类号： H02N2/163 , H02N2/0065 , H02N2/007
摘要： An ultrasonic motor which achieves uniform contact between the vibrating body and the moving body and features high output transfer efficiency and high reliability, and by which the manufacturing process for the moving body thereof can be simplified and the moving body made lighter.By comprising the moving body of a carbon fiber reinforced resin composite material reinforced by at least carbon fiber, and constructing the moving body with a both-side supported or single-side supported beam construction, elasticity according to the pressure of the ultrasonic motor can be imparted in the direction of pressure of the moving body. Thus, the undulations in the contact surface of the vibrating body and the moving body can be absorbed and stable, uniform contact can be assured, and long-term maintenance of a stable friction condition can be achieved.
摘要翻译： 一种实现振动体与移动体均匀接触的超声波马达，具有输出转印效率高，可靠性高，可以简化移动体的制造工序，使移动体变轻。 通过将由至少碳纤维增强的碳纤维增强树脂复合材料的移动体构成，并且通过双侧支撑或单侧支撑梁结构构造移动体，根据超声波马达的压力可以具有弹性 在移动体的压力方向上施加。 因此，振动体和移动体的接触面的波动可以被吸收稳定，可以保证均匀的接触，并且可以实现稳定的摩擦条件的长期维持。
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