发明授权
- 专利标题: Vibration gyro sensor, combined sensor, and method for producing vibration gyro sensor
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申请号: US09545688申请日: 2000-04-07
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公开(公告)号: US06244110B1公开(公告)日: 2001-06-12
- 发明人: Yukihisa Takeuchi , Masahiko Namerikawa , Kazuyoshi Shibata , Takao Ohnishi
- 申请人: Yukihisa Takeuchi , Masahiko Namerikawa , Kazuyoshi Shibata , Takao Ohnishi
- 优先权: JP8-76434 19960329; JP8-203595 19960801
- 主分类号: G01C1900
- IPC分类号: G01C1900
摘要:
A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.
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