公开(公告)号：US06789423B2

公开(公告)日：2004-09-14

申请号：US10330710

申请日：2002-12-27

申请人： Seung Do An ,  Kyoung Soo Kim ,  Ji Man Cho

发明人： Seung Do An ,  Kyoung Soo Kim ,  Ji Man Cho

IPC分类号： G01C1900

CPC分类号： B81C1/00301 ,  B81B2201/025 ,  B81B2207/095 ,  B81C2201/019 ,  B81C2203/0118 ,  B81C2203/038 ,  G01C19/5783 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  Y10T428/24322

摘要： The present invention provides a micro inertia sensor and a method of manufacturing the same, the micro inertia sensor includes a lower glass substrate; a lower silicon including a first border, a first fixed point and a side movement sensing structure; an upper silicon including a second border, a second fixed point being connected to a via hole, in which a metal wiring is formed, on an upper side, and an sensing electrode, which correspond to the first border, the first fixed point and the side movement sensing structure; a bonded layer by a eutectic bonding between the upper silicon and the lower silicon; and a upper glass substrate, being positioned on an upper portion of the upper silicon, for providing the via hole on which an electric conduction wiring is formed, thereby aiming at the miniaturization of the product and the simplification of the process.

公开(公告)号：US06655210B2

公开(公告)日：2003-12-02

申请号：US10008759

申请日：2001-11-08

申请人： Katsumi Fujimoto

发明人： Katsumi Fujimoto

IPC分类号： G01C1900

CPC分类号： H03H9/58 ,  G01C19/5642 ,  G01C19/5663 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/60 ,  H03H2009/02496 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/4957

摘要： The present invention provides a composite vibrator that can maintain high sensitivity even when miniaturized. The composite vibrator includes tuning bar vibrators having the same length and support members for supporting the tuning bar vibrators. The tuning bar vibrators are arranged in a direction orthogonal to the longitudinal direction to be coupled with each other near nodes of bending vibrations occurring at both free ends of the tuning bar vibrators. In this arrangement, since the tuning bar vibrators are coupled with each other, the mass of the composite vibrator increases. Thus, even when the length of the longitudinal direction of the tuning bar vibrator is reduced, due to the increased mass, higher sensitivity for the detection of an angular velocity can be obtained.

公开(公告)号：US06647785B2

公开(公告)日：2003-11-18

申请号：US09916997

申请日：2001-07-27

申请人： Robert E. Stewart ,  John T. Douglass ,  Stanley F. Wyse

发明人： Robert E. Stewart ,  John T. Douglass ,  Stanley F. Wyse

IPC分类号： G01C1900

CPC分类号： G01C19/5691

摘要： A rotation sensing system includes a rotation sensor that produces a signal in response to an input rotation about a sensing axis. A servo system is arranged to rotate the rotation sensor at an angle about the sensing axis to null the signal from the rotation sensor such that the rotation sensor is substantially inertially stable. The rotation sensing system is mounted on a resolver arranged to measure the angle through which the servo system has rotated the rotation sensor.

摘要翻译： 旋转感测系统包括旋转传感器，其响应于关于感测轴的输入旋转而产生信号。 伺服系统被布置成以围绕感测轴线的角度旋转旋转传感器，以使来自旋转传感器的信号为零，使得旋转传感器基本上是惯性稳定的。 旋转感测系统安装在旋转变压器上，该解算器被布置成测量伺服系统旋转旋转传感器的角度。

公开(公告)号：US06636819B1

公开(公告)日：2003-10-21

申请号：US09680375

申请日：2000-10-05

申请人： Eric Abbott ,  Randy Sprague ,  James Michael McLaughlin

发明人： Eric Abbott ,  Randy Sprague ,  James Michael McLaughlin

IPC分类号： G01C1900

CPC分类号： G01P15/097 ,  G01C19/56

摘要： A method for improving the performance of a micromachined device, preferably an angular rate microsensor, is provided. The method includes collecting data on rate bias over a selected operating phase demodulation angles for at least one tine of a microsensor and determining optimum settings for phase demodulation angles at which the rate bias hysteresis over temperature is at a minimum by applying dynamic programming.

摘要翻译： 提供了一种用于改善微加工装置，优选角速率微传感器的性能的方法。 该方法包括针对微传感器的至少一个尖峰在所选择的操作相位解调角度收集关于速率偏差的数据，并且通过应用动态规划来确定温度上的速率偏差滞后最小的相位解调角度的最佳设置。

公开(公告)号：US06568267B2

公开(公告)日：2003-05-27

申请号：US09838287

申请日：2001-04-20

申请人： Kazumi Chida ,  Masato Hashimoto ,  Masaru Nagao ,  Hidemi Senda ,  Norihisa Okayama ,  Keiko Neki ,  Masahiro Sugimoto

发明人： Kazumi Chida ,  Masato Hashimoto ,  Masaru Nagao ,  Hidemi Senda ,  Norihisa Okayama ,  Keiko Neki ,  Masahiro Sugimoto

IPC分类号： G01C1900

CPC分类号： G01C19/5719 ,  G01P2015/0814

摘要： A sensing device, such as an angular speed detecting device, includes a vibrator for improving detection precision. The vibrator is displaceably supported on a substrate and is vibrated in the direction of an X-axis by driving electrodes. Detecting electrodes detect vibrations of the vibrator in the direction of a Y-axis caused by a Coriolis' force resulting from the angular speed occurring about a Z-axis. Each of the driving and detecting electrodes includes a movable electrode that is connected to the vibrator and that is displaced together therewith on the substrate and a fixed electrode fixed onto the substrate in such a manner as to face the movable electrode. By equalizing conductors connected to fixed electrodes of the driving electrodes and conductors connected to fixed electrodes of the detecting electrodes in length, width, and thickness, respectively, one electrical characteristic is set for those of the wiring portions which function in the same manner.

摘要翻译： 诸如角速度检测装置的感测装置包括用于提高检测精度的振动器。 振动器被可移动地支撑在基板上，并且通过驱动电极在X轴的方向上振动。 检测电极通过由围绕Z轴的角速度产生的科里奥利力产生的Y轴方向检测振动器的振动。 每个驱动和检测电极都包括一个可动电极，它连接到振子上并与基板一起位移在一起，固定电极以面对可动电极的方式固定在基板上。 通过使连接到驱动电极的固定电极的导体和连接到检测电极的固定电极的导体的长度，宽度和厚度分别相等，为相同方式起作用的布线部分设置一个电特性。

公开(公告)号：US06557415B2

公开(公告)日：2003-05-06

申请号：US10198971

申请日：2002-07-19

申请人： Robert E. Stewart ,  Stanley F. Wyse

发明人： Robert E. Stewart ,  Stanley F. Wyse

IPC分类号： G01C1900

CPC分类号： G01P15/14 ,  G01C19/56 ,  G01P15/097

摘要： A simplified and smaller accelerometer-gyro is provided by combining gyro and accelerometer functions in a single sensor unit which has a pair of counter oscillating accelerometers each having a pendulum or sense element and a vibrating element. The pendulum and vibrating element of each accelerometer are designed to be symmetrical so that the center of mass for each accelerometer are on a line which is parallel to the dither motion of the unit. The geometry of these two pendulums is configured so that the centers of percussion of each is at the same point. Electrodes on the top and bottom cover of the sensor unit combine the pickoff and forcing function with the pendulum tuning function, thereby simplifying electrical connection. A pair of mounting tabs are fastened to the frame by respective compliant beams. The accelerometer-gyro may be mounted in an enclosure that maintains a pressure below atmospheric around the accelerometer-gyro.

公开(公告)号：US06553834B2

公开(公告)日：2003-04-29

申请号：US09907729

申请日：2001-07-17

申请人： Graeme A. Blake

发明人： Graeme A. Blake

IPC分类号： G01C1900

CPC分类号： H03H9/2473 ,  G01L1/106 ,  G01P15/097

摘要： A resonator beam structure that, during vibration of the tines, minimizes coupling of a longitudinal motion of the tines into a support structure to which the resonator beam is attached. The resonator beam includes a pair of tines; a first base region mechanically coupling a first ends of the tines together; a second base region mechanically coupling the second ends of the tines together; a first cutout of a first predetermined geometry at a first predetermined position in a closed interior portion of the first base region; and a second cutout of a second predetermined geometry at a second predetermined position in a closed interior portion of the second base region. The invention includes a method for using finite element analysis to determine an optimum geometry and position of the cutouts.

公开(公告)号：US06367786B1

公开(公告)日：2002-04-09

申请号：US09588878

申请日：2000-06-06

申请人： Roman Gutierrez ,  Tony K. Tang ,  Kirill Shcheglov

发明人： Roman Gutierrez ,  Tony K. Tang ,  Kirill Shcheglov

IPC分类号： G01C1900

CPC分类号： G01C19/5719

摘要： A micromachined resonator mountable to an external support structure has a proof mass coupled to a base structure by a first spring structure, the base structure having a plurality of electrodes, and a second spring structure coupling the base structure to the external support structure.

摘要翻译： 可安装到外部支撑结构的微加工谐振器具有通过第一弹簧结构连接到基座结构的检测质量，基部结构具有多个电极，以及将基部结构连接到外部支撑结构的第二弹簧结构。

公开(公告)号：US06324482B1

公开(公告)日：2001-11-27

申请号：US09254691

申请日：1999-04-08

申请人： Toshiya Nakagaki ,  Toshiyuki Nozoe ,  Takahiro Manabe

发明人： Toshiya Nakagaki ,  Toshiyuki Nozoe ,  Takahiro Manabe

IPC分类号： G01C1900

CPC分类号： G01D3/022 ,  G01D3/036 ,  G01D18/008

摘要： An object of the present invention is to provide an automatic compensation sensor that can eliminate an exclusive input terminal for the compensation mode signal. To achieve this object, the present invention comprises a sensor body (1), a signal output terminal (5) for outputting signals from the sensor body (1), and a controller for compensating the output signal from this signal output terminal (5).

摘要翻译： 本发明的目的是提供一种能够消除用于补偿模式信号的专用输入端的自动补偿传感器。 为了实现该目的，本发明包括传感器体（1），用于输出来自传感器体（1）的信号的信号输出端子（5）和用于补偿来自该信号输出端子（5）的输出信号的控制器， 。

公开(公告)号：US06257059B1

公开(公告)日：2001-07-10

申请号：US09405721

申请日：1999-09-24

申请人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

发明人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

IPC分类号： G01C1900

CPC分类号： G01C19/5719

摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.

摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 在一个实施例中，电容器板以平行的条带设置在由支撑结构从衬底悬挂的两个有孔的平坦的防护块下方。 证明质量通过静电梳驱动器配对并设置在相反的振动运动中。 响应于关于平面外输入轴的输入角速率，证明质量相对于条纹电容器平移，从而根据输入速率改变电容器条和证明质量块之间的电容。 在另一个实施例中，梳状驱动器的校准质量梳被啮合在固定的驱动梳之间，它们被成对180度异相电激励。 当证明质量响应于角度输入时，证明质量梳与固定梳之间的距离发生变化，从而改变梳子之间的电容，导致作为输入速率的指示被检测到的校验质量块上的不平衡电压 。 外置音叉陀螺仪可以与两个平面内的音叉陀螺仪相结合，从单个晶片或单个芯片提供完整的三轴惯性测量单元。