发明授权
US06248847B1 Copolymer resin, preparation thereof, and photoresist using the same
有权
共聚物树脂及其制备方法和使用其的光致抗蚀剂
- 专利标题: Copolymer resin, preparation thereof, and photoresist using the same
- 专利标题(中): 共聚物树脂及其制备方法和使用其的光致抗蚀剂
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申请号: US09208650申请日: 1998-12-10
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公开(公告)号: US06248847B1公开(公告)日: 2001-06-19
- 发明人: Min Ho Jung , Jae Chang Jung , Cheol Kyu Bok , Ki Ho Baik
- 申请人: Min Ho Jung , Jae Chang Jung , Cheol Kyu Bok , Ki Ho Baik
- 优先权: KR97-81370 19971231
- 主分类号: C08F2606
- IPC分类号: C08F2606
摘要:
The present invention relates to a copolymer resin for ultra-shortwave light source such as KrF or ArF, process for preparation thereof, and photoresist comprising the same resin. The copolymer resin according to the present invention is easily prepared by conventional radical polymerization due to the introduction of norbonyl(meth)acrylate unit to a structure of copolymer for photoresist. The resin has high transparency at 193 nm wavelength, provides increased etching resistance and enhanced adhesive strength due to a hydrophilic functional group in the norbonyl group, and shows excellent resolution of 0.15 &mgr;m in practical experiment of patterning.
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