发明授权
- 专利标题: Surface mount circuit device and solder bumping method therefor
- 专利标题(中): 表面贴装电路器件及其焊接凸块的方法
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申请号: US09280946申请日: 1999-03-29
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公开(公告)号: US06251501B1公开(公告)日: 2001-06-26
- 发明人: William David Higdon , Shing Yeh
- 申请人: William David Higdon , Shing Yeh
- 主分类号: B32B300
- IPC分类号: B32B300
摘要:
A solder bumping method and structure for producing fine-pitch solder bump and which eliminate conventional process compatibility requirements for under bump metallurgy (UBM) and solder bump formation. The method generally entails forming an input/output pad on the surface of a semiconductor device, and then forming a metal layer on the input/output pad that will serve as the UBM of the solder bump. A plating seed layer is then formed on the UBM and on the surrounding surface of the device, after which a mask is formed on the plating seed layer and a via is formed in the mask to expose a portion of the plating seed layer overlying the UBM, and preferably portions of the plating seed layer not overlying the UBM. A solder material is then deposited on the portion of the plating seed layer exposed within the via. Because the via is not limited by the size of the UBM, the deposited solder material is able to cover an area larger than the metal layer, thereby increasing the amount of solder material available to form the solder bump without requiring a thicker mask.
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