发明授权
- 专利标题: Thin film transistor-liquid crystal display and a manufacturing method thereof
- 专利标题(中): 薄膜晶体管液晶显示器及其制造方法
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申请号: US09121911申请日: 1998-07-24
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公开(公告)号: US06251715B1公开(公告)日: 2001-06-26
- 发明人: Byung-Hoo Jung , Yong-Suk Jin , Joo-Hyung Lee , Chang-Won Hwang
- 申请人: Byung-Hoo Jung , Yong-Suk Jin , Joo-Hyung Lee , Chang-Won Hwang
- 优先权: KR95-12232 19950517; KR95-12241 19950517
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
The present invention relates to a thin film transistor-liquid crystal display (hereinafter referred to as a TFT-LCD) and a manufacturing method thereof. An amorphous silicon is deposited on a substrate. The amorphous silicon is transformed into a poly silicon by method of solid phase crystallization, and the first poly silicon layer pattern is formed by etching. An amorphous silicon is deposited on the first poly silicon layer pattern. The amorphous silicon is transformed into a second poly silicon layer by method of solid phase crystallization.
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