发明授权
- 专利标题: Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
- 专利标题(中): 使用应力敏感膜的静电可调共振频率束
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申请号: US09404954申请日: 1999-09-24
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公开(公告)号: US06263736B1公开(公告)日: 2001-07-24
- 发明人: Thomas G. Thundat , Eric A. Wachter , J. Kenneth Davis
- 申请人: Thomas G. Thundat , Eric A. Wachter , J. Kenneth Davis
- 主分类号: G01P1500
- IPC分类号: G01P1500
摘要:
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.
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