公开(公告)号：US06263736B1

公开(公告)日：2001-07-24

申请号：US09404954

申请日：1999-09-24

申请人： Thomas G. Thundat ,  Eric A. Wachter ,  J. Kenneth Davis

发明人： Thomas G. Thundat ,  Eric A. Wachter ,  J. Kenneth Davis

IPC分类号： G01P1500

CPC分类号： G01H3/04 ,  G01H1/14 ,  G01H11/06

摘要： Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.

摘要翻译： 用于检测声振动特定频率的方法和装置利用具有应力敏感涂层的静电可调波束元件，以及用于提供静电力以控制地偏转光束元件从而改变其刚度及其谐振频率的装置。 然后，从静电可调波束元件的响应确定到波束曝光的声振动，无论是否检测到特定频率或声频振动。

公开(公告)号：US06311557B1

公开(公告)日：2001-11-06

申请号：US09405461

申请日：1999-09-24

申请人： J. Kenneth Davis ,  Thomas G. Thundat ,  Eric A. Wachter

发明人： J. Kenneth Davis ,  Thomas G. Thundat ,  Eric A. Wachter

IPC分类号： G01P1508

CPC分类号： G01H1/14 ,  B06B1/0603 ,  G01H3/08 ,  G01H9/00

摘要： Methods and apparatus for detecting particular frequencies of vibration utilize a magnetically-tunable beam element having a stress-sensitive coating and means for providing magnetic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the magnetically-tunable beam element to the vibration to which the beam is exposed whether or not a particular frequency or frequencies of vibration are detected.

摘要翻译： 用于检测特定振动频率的方法和装置利用具有应力敏感涂层的磁可调波束元件，以及用于提供磁力以可控地偏转梁元件从而改变其刚度及其共振频率的装置。 然后，根据磁力可调波束元件对波束曝光的振动的响应，确定是否检测到特定频率或振动频率。

公开(公告)号：US5445008A

公开(公告)日：1995-08-29

申请号：US217411

申请日：1994-03-24

申请人： Eric A. Wachter ,  Thomas G. Thundat

发明人： Eric A. Wachter ,  Thomas G. Thundat

IPC分类号： B81B3/00 ,  G01N27/00

CPC分类号： G01N29/036 ,  B82Y30/00 ,  B82Y35/00 ,  G01N2291/0257

摘要： A mass microsensor is fabricated with a microcantilever oscillated by a piezoelectric transducer. A chemical coating having absorptive or adsorptive affinity for a specifically targeted chemical or compound is applied to the microcantilever for oscillation in the monitored atmosphere. Molecules of the targeted chemical attach to the microcantilever coating resulting in an oscillating mass increase which influences the resonant frequency of the microcantilever oscillation. The rate at which the coated microcantilever accumulates the target chemical is functional of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change is related to the concentration of the target chemical within the monitored atmosphere. Such oscillation frequency changes are detected by a center-crossing photodiode which responds to a laser diode beam reflected from the microcantilever surface resulting in an output frequency from the photodiode that is synchronous with the microcantilever frequency.

摘要翻译： 质量微传感器由具有由压电传感器振荡的微悬臂梁制造。 将具有吸收或吸附亲和力的化学涂层施加到微悬臂梁上以在监测的气氛中振荡。 目标化学物质的分子附着在微悬臂梁涂层上，导致振荡质量增加，影响微悬臂梁振荡的共振频率。 涂覆的微悬臂梁累积目标化学物质的速率是目标化学物质浓度的函数。 因此，微悬臂梁振荡频率变化的程度与被监测气氛中目标化学物质的浓度有关。 这种振荡频率变化由中心交叉光电二极管检测，该中心交叉光电二极管响应于从微悬臂梁表面反射的激光二极管光束，导致来自与微悬臂梁频率同步的光电二极管的输出频率。

公开(公告)号：US6118124A

公开(公告)日：2000-09-12

申请号：US588484

申请日：1996-01-18

申请人： Thomas G. Thundat ,  Robert J. Warmack ,  Eric A. Wachter

发明人： Thomas G. Thundat ,  Robert J. Warmack ,  Eric A. Wachter

IPC分类号： G01J1/00 ,  B81B3/00 ,  G01J1/04 ,  G01J5/00 ,  G01J5/10 ,  G01J5/40 ,  G01J5/44 ,  G01N13/16 ,  G01T1/02 ,  G01J5/34

CPC分类号： G01J1/04 ,  G01J1/047 ,  G01J5/40 ,  G01J5/44 ,  H01G5/18 ,  H01G5/38 ,  B82Y35/00

摘要： Electromagnetic and nuclear radiation is detected by micromechanical sensors that can be coated with various interactive materials. As the micromechanical sensors absorb radiation, the sensors bend and/or undergo a shift in resonance characteristics. The bending and resonance changes are detected with high sensitivity by any of several detection methods including optical, capacitive, and piezoresistive methods. Wide bands of the electromagnetic spectrum can be imaged with picoJoule sensitivity, and specific absorptive coatings can be used for selective sensitivity in specific wavelength bands. Microcantilevers coated with optical cross-linking polymers are useful as integrating optical radiation dosimeters. Nuclear radiation dosimetry is possible by fabricating cantilevers from materials that are sensitive to various nuclear particles or radiation. Upon exposure to radiation, the cantilever bends due to stress and its resonance frequency shifts due to changes in elastic properties, based on cantilever shape and properties of the coating.

摘要翻译： 电磁和核辐射由可以用各种交互材料涂覆的微机械传感器检测。 当微机械传感器吸收辐射时，传感器弯曲和/或经历谐振特性的偏移。 通过包括光学，电容和压阻方法的几种检测方法中的任何一种，以高灵敏度检测弯曲和谐振变化。 电磁光谱的宽带可以用微微焦灵敏感度成像，并且特定吸收涂层可用于特定波长带中的选择性灵敏度。 涂有光学交联聚合物的微悬臂梁可用作整合光学辐射剂量计。 可以通过从对各种核粒子或辐射敏感的材料制造悬臂来进行核辐射剂量测定。 暴露于辐射后，基于悬臂形状和涂层性质，悬臂由于应力而引起弯曲，并且由于弹性性质的变化而引起的共振频率偏移。

公开(公告)号：US06336366B1

公开(公告)日：2002-01-08

申请号：US09405924

申请日：1999-09-24

申请人： Thomas G. Thundat ,  Eric A. Wachter

发明人： Thomas G. Thundat ,  Eric A. Wachter

IPC分类号： G01P1509

CPC分类号： G01H3/08

摘要： Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.

摘要翻译： 用于检测声振动的特定频率的方法和装置利用具有压电层和应力敏感层的压电可调波束元件，以及用于在压电层两端提供电势以可控地改变光束的刚度从而改变其谐振频率的装置。 然后，由压电可调波束元件对波束元件所暴露的声振动的响应确定是否检测到特定频率或声频振动频率。

公开(公告)号：US5719324A

公开(公告)日：1998-02-17

申请号：US491203

申请日：1995-06-16

申请人： Thomas G. Thundat ,  Eric A. Wachter

发明人： Thomas G. Thundat ,  Eric A. Wachter

IPC分类号： B81B3/00 ,  G01N27/00 ,  G01Q20/02

CPC分类号： G01N29/022 ,  B82Y35/00 ,  G01N2291/0256

摘要： An improved microcantilever sensor is fabricated with at least one microcantilever attached to a piezoelectric transducer. The microcantilever is partially surface treated with a compound selective substance having substantially exclusive affinity for a targeted compound in a monitored atmosphere. The microcantilever sensor is also provided with a frequency detection means and a bending detection means. The frequency detection means is capable of detecting changes in the resonance frequency of the vibrated microcantilever in the monitored atmosphere. The bending detection means is capable of detecting changes in the bending of the vibrated microcantilever in the monitored atmosphere coactively with the frequency detection means. The piezoelectric transducer is excited by an oscillator means which provides a signal driving the transducer at a resonance frequency inducing a predetermined order of resonance on the partially treated microcantilever. Upon insertion into a monitored atmosphere, molecules of the targeted chemical attach to the treated regions of the microcantilever resulting in a change in oscillating mass as well as a change in microcantilever spring constant thereby influencing the resonant frequency of the microcantilever oscillation. Furthermore, the molecular attachment of the target chemical to the treated regions induce areas of mechanical strain in the microcantilever consistent with the treated regions thereby influencing microcantilever bending. The rate at which the treated microcantilever accumulates the target chemical is a function of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change and bending is related to the concentration of target chemical within the monitored atmosphere.

摘要翻译： 制造改进的微悬臂梁传感器，其具有连接到压电换能器的至少一个微悬臂梁。 微型悬臂梁在被监测的气氛中对目标化合物具有基本上独特亲和性的化合物选择性物质进行部分表面处理。 微悬臂传感器还具有频率检测装置和弯曲检测装置。 频率检测装置能够检测所监视的气氛中的振动微悬臂梁的共振频率的变化。 弯曲检测装置能够与频率检测装置一起检测被监视气氛中的振动微悬臂梁的弯曲变化。 压电换能器由振荡器装置激励，该振荡器装置提供以共振频率驱动换能器的信号，该谐振频率在部分处理的微悬臂梁上引起预定的谐振次数。 当插入到监测的气氛中时，目标化学物质的分子附着到微悬臂梁的处理区域，导致振荡质量的变化以及微悬臂弹簧常数的变化，从而影响微悬臂梁振荡的谐振频率。 此外，目标化学物质与处理区域的分子连接在微悬臂梁中引起与处理区域一致的机械应变区域，从而影响微悬臂梁弯曲。 处理过的微量悬浮液累积目标化学物质的速率是目标化学物质浓度的函数。 因此，微悬臂梁振荡频率变化和弯曲的程度与被监测气氛中目标化学物质的浓度有关。

公开(公告)号：US08110082B2

公开(公告)日：2012-02-07

申请号：US11731952

申请日：2007-04-02

申请人： Thomas G. Thundat ,  Thomas L Ferrell ,  Gilbert M. Brown

发明人： Thomas G. Thundat ,  Thomas L Ferrell ,  Gilbert M. Brown

IPC分类号： G01N27/453 ,  H01L31/00

CPC分类号： G01N27/305

摘要： A method, system, and apparatus are provided for separating molecules, such as biomolecules. The method, system, and apparatus utilize an electrochemical cell having at least two electrodes, one electrode comprising a photo-sensitive material capable of generating a photopotential. Molecules are moved through an electrolyte medium between the at least two electrodes based upon localized photopotentials.

摘要翻译： 提供了一种分离分子的方法，系统和装置，例如生物分子。 该方法，系统和装置利用具有至少两个电极的电化学电池，一个电极包括能够产生光电势的光敏材料。 基于局部的光电势，分子在至少两个电极之间移动通过电解质介质。

公开(公告)号：US07716965B2

公开(公告)日：2010-05-18

申请号：US11588542

申请日：2006-10-27

申请人： Thomas G. Thundat ,  Gilbert M. Brown

发明人： Thomas G. Thundat ,  Gilbert M. Brown

IPC分类号： G01N27/00

CPC分类号： G01N29/036 ,  G01N2291/0256

摘要： An electrochemical suspended element-based sensor system includes a solution cell for holding an electrolyte comprising solution including at least one electrochemically reducible or oxidizable species. A working electrode (WE), reference electrode (RE) and a counter electrode (CE) are disposed in the solution. The CE includes an asymmetric suspended element, wherein one side of the suspended element includes a metal or a highly doped semiconductor surface. The suspended element bends when current associated with reduction or oxidation of the electrochemically reducible or oxidizable species at the WE passes through the suspended element. At least one measurement system measures the bending of the suspended element or a parameter which is a function of the bending.

摘要翻译： 基于电化学悬浮元件的传感器系统包括用于保持电解质的溶液池，所述电解质包含至少一种电化学还原性或可氧化物质的溶液。 在该溶液中设置工作电极（WE），参比电极（RE）和对电极（CE）。 CE包括不对称悬置元件，其中悬浮元件的一侧包括金属或高度掺杂的半导体表面。 当与WE的电化学还原性或可氧化物质的还原或氧化相关的电流通过悬浮元件时，悬浮元件弯曲。 至少一个测量系统测量悬挂元件的弯曲或作为弯曲函数的参数。

公开(公告)号：US20090020426A1

公开(公告)日：2009-01-22

申请号：US11778162

申请日：2007-07-16

申请人： Thomas G. Thundat ,  Ali Passian ,  Rubye H. Farahi

发明人： Thomas G. Thundat ,  Ali Passian ,  Rubye H. Farahi

IPC分类号： G01N27/26

CPC分类号： B01L3/50273 ,  B01L3/502792 ,  B01L2200/0652 ,  B01L2200/10 ,  B01L2300/0663 ,  B01L2300/0819 ,  B01L2300/0851 ,  B01L2300/089 ,  B01L2300/165 ,  B01L2300/1861 ,  B01L2400/04 ,  B01L2400/0427 ,  B01L2400/0448 ,  B01L2400/0496

摘要： Low energy light illumination and either a doped semiconductor surface or a surface-plasmon supporting surface are used in combination for manipulating a fluid on the surface in the absence of any applied electric fields or flow channels. Precise control of fluid flow is achieved by applying focused or tightly collimated low energy light to the surface-fluid interface. In the first embodiment, with an appropriate dopant level in the semiconductor substrate, optically excited charge carriers are made to move to the surface when illuminated. In a second embodiment, with a thin-film noble metal surface on a dispersive substrate, optically excited surface plasmons are created for fluid manipulation. This electrode-less optical control of the Marangoni effect provides re-configurable manipulations of fluid flow, thereby paving the way for reprogrammable microfluidic devices.

摘要翻译： 组合使用低能量光照射和掺杂半导体表面或表面等离子体支撑表面，以在没有任何施加的电场或流动通道的情况下操纵表面上的流体。 通过将聚焦或紧密准直的低能量光施加到表面 - 流体界面来实现流体流动的精确控制。 在第一实施例中，在半导体衬底中具有适当的掺杂剂水平，使光激发的电荷载流子在被照射时移动到​​表面。 在第二实施例中，利用分散衬底上的薄膜贵金属表面，产生用于流体操纵的光激发的表面等离子体激元。 Marangoni效应的无电极光学控制提供了可重新配置的流体流动操作，从而为重新编程的微流体装置铺平了道路。

公开(公告)号：US06289717B1

公开(公告)日：2001-09-18

申请号：US09281032

申请日：1999-03-30

申请人： Thomas G. Thundat ,  K. Bruce Jacobson ,  Mitchel J. Doktycz ,  Stephen J. Kennel ,  Robert J. Warmack

发明人： Thomas G. Thundat ,  K. Bruce Jacobson ,  Mitchel J. Doktycz ,  Stephen J. Kennel ,  Robert J. Warmack

IPC分类号： G01N1910

CPC分类号： G01N33/54373

摘要： A sensor apparatus is provided using a microcantilevered spring element having a coating of a detector molecule such as an antibody or antigen. A sample containing a target molecule or substrate is provided to the coating. The spring element bends in response to the stress induced by the binding which occurs between the detector and target molecules. Deflections of the cantilever are detected by a variety of detection techniques. The microcantilever may be approximately 1 to 200 &mgr;m long, approximately 1 to 50 &mgr;m wide, and approximately 0.3 to 3.0 &mgr;m thick. A sensitivity for detection of deflections is in the range of 0.01 nanometers.

摘要翻译： 使用具有检测器分子如抗体或抗原的涂层的微悬臂弹簧元件提供传感器装置。 将包含靶分子或基底的样品提供给涂层。 弹簧元件响应于由检测器和靶分子之间发生的结合引起的应力而弯曲。 通过各种检测技术检测悬臂的偏转。 该微悬臂梁的长度可以为约1至200μm，宽度大约为1至50μm，厚度为0.3至3.0μm。 检测偏转的灵敏度在0.01纳米的范围内。