发明授权
US06265793B1 Linear motor coil for exposure apparatus 有权
用于曝光设备的直线电机线圈

  • 专利标题: Linear motor coil for exposure apparatus
  • 专利标题(中): 用于曝光设备的直线电机线圈
  • 申请号: US09438524
    申请日: 1999-11-12
  • 公开(公告)号: US06265793B1
    公开(公告)日: 2001-07-24
  • 发明人: Nobushige Korenaga
  • 申请人: Nobushige Korenaga
  • 优先权: JP10-338508 19981112; JP11-298171 19991020
  • 主分类号: H02K4100
  • IPC分类号: H02K4100
Linear motor coil for exposure apparatus
摘要:
A conductive foil is wound into a roll to provide a roll coil, and the roll coil is cut along wire paths, whereby a flat coil with a level difference is produced. Similarly, a flat coil without a level difference is sliced from the roll coil. The flat coil with a level difference and the flat coil without a level difference are then disposed with partial overlapping, while magnet side faces of the coils become coplanar with each other, to provide a unit coil. A plurality of unit coils can be placed juxtaposed with each other, to provide a stator for a linear motor. The number of working operations is reduced significantly, and the reliability of the coil itself is improved.
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