公开(公告)号：US06836031B2

公开(公告)日：2004-12-28

申请号：US09998691

申请日：2001-12-03

申请人： Keiji Emoto ,  Kazuhito Outuka ,  Yoshikazu Miyajima

发明人： Keiji Emoto ,  Kazuhito Outuka ,  Yoshikazu Miyajima

IPC分类号： H02K4100

CPC分类号： G03F7/70758 ,  H02K3/47 ,  H02K41/031

摘要： Some of linear motors which constitute an exposure apparatus have coils each obtained by winding a copper foil wire as a foil-like conductor having an insulating layer around a core member in a multilayered structure. The coil is fixed to a positioning portion serving as the coil fixing portion of the linear motor by using the core member. The core member is formed from the same insulating material with low thermal conductivity as that of the positioning portion of a linear motor housing or a material with almost the same linear expansion coefficient.

摘要翻译： 构成曝光装置的一些线性电动机具有线圈，它们是通过以多层结构缠绕铜箔线作为具有绝缘层的箔状导体而获得的线圈。 线圈通过使用芯部件固定到用作线性电动机的线圈固定部分的定位部分。 芯构件由与线性电动机壳体的定位部分或具有几乎相同的线性膨胀系数的材料相同的绝缘材料形成。

公开(公告)号：US06828698B2

公开(公告)日：2004-12-07

申请号：US10170978

申请日：2002-06-13

申请人： Shahab Hatam-Tabrizi ,  Wei-Hung Yeh

发明人： Shahab Hatam-Tabrizi ,  Wei-Hung Yeh

IPC分类号： H02K4100

CPC分类号： G02B6/3572 ,  G02B6/3512 ,  G02B26/0833 ,  G02B26/085

摘要： A gimbal for supporting a moveable mirror includes an attachment section, first and second pairs of beams extending along the x-axis and connected to the attachment section, and third and fourth pairs of beams extending along the y-axis connected with the first and second pair of beams. The connections are such that the mirror can tilt or rotate about both the x-axis and y-axis. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

摘要翻译： 用于支撑可移动反射镜的万向架包括附接部分，沿x轴延伸并连接到附接部分的第一和第二对梁，以及沿着与第一和第二连接的y轴延伸的第三和第四对梁 一对梁。 这些连接使得反射镜可以围绕x轴和y轴倾斜或旋转。 要强调的是，该摘要被提供以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US06825580B2

公开(公告)日：2004-11-30

申请号：US09777689

申请日：2001-02-07

申请人： Ji Hyun Hwang ,  Do Hyun Kim ,  Ki Ha Lee

发明人： Ji Hyun Hwang ,  Do Hyun Kim ,  Ki Ha Lee

IPC分类号： H02K4100

CPC分类号： H02K41/03 ,  H02K2201/18

摘要： An apparatus for controlling cooling of a gantry having a linear motor includes: a stator provided with a first temperature sensor, having a heat sink and a cooling fan at predetermined portions of an X-axis and an Y-axis linear motors; a mover provided with a second temperature sensor, having a heat sink installed on the upper surface of an X-axis and a Y-axis linear motors; an encoder for sensing a position and velocity of the mover; an encoder periphery sensor part for measuring surroundings (a temperature, a humidity and a pressure) of the encoder; an A/D converter for receiving a first and a second temperature signals and converting them from an analog signal to a digital signal and outputting the same; a controller for controlling a drive signal outputted from a mover driver unit to control the velocity of the Y-axis linear motor and the X-axis linear motor; a D/V converter for converting digital signals, that is, a cooling fan control signal and an air valve control signal to a plurality of drive signals, that is, analog signals; and a mover driver for providing the drive signal to a coil block.

摘要翻译： 一种用于控制具有线性电动机的机架的冷却的装置，包括：具有第一温度传感器的定子，其具有在X轴和Y轴线性电动机的预定部分处的散热器和冷却风扇; 具有第二温度传感器的移动器，具有安装在X轴的上表面上的散热器和Y轴线性电动机; 用于感测动子的位置和速度的编码器; 编码器周边传感器部分，用于测量编码器的周围环境（温度，湿度和压力）; A / D转换器，用于接收第一和第二温度信号并将它们从模拟信号转换成数字信号并输出​​; 用于控制从动子驱动器单元输出的驱动信号以控制Y轴线性电动机和X轴线性电动机的速度的控制器; 用于将数字信号转换为多个驱动信号的冷却风扇控制信号和空气阀控制信号的D / V转换器，即模拟信号; 以及用于向线圈块提供驱动信号的移动驱动器。

公开(公告)号：US06822350B2

公开(公告)日：2004-11-23

申请号：US10480028

申请日：2003-12-08

申请人： Thomas Hoppe

发明人： Thomas Hoppe

IPC分类号： H02K4100

CPC分类号： H02K41/031

摘要： The invention relates to a secondary part for a linear motor, comprising several permanent magnets (3) which are juxtaposed and embedded in a cast body (5) of plastic compound on a carrier plate (1). According to the invention, longitudinal grooves are provided alongside the juxtaposed permanent magnets (3) in the cast body (5) to receive cooling pipes (9). The grooves are preferably configured as undercut grooves and form locking means for securing the cooling pipes (9). The inventive measures are particularly useful for forming secondary parts from several juxtaposed secondary part elements, whereby single-piece cooling pipes can be used for all of the segments.

公开(公告)号：US06815847B2

公开(公告)日：2004-11-09

申请号：US10819601

申请日：2004-04-07

申请人： Gerald David Duncan ,  John Henry Boyd

发明人： Gerald David Duncan ,  John Henry Boyd

IPC分类号： H02K4100

CPC分类号： H02K33/16 ,  F04B35/045 ,  F04B2203/0401 ,  F04B2203/0404 ,  H02K33/18 ,  H02P6/006 ,  H02P25/032 ,  H02P25/06

摘要： An electric linear motor for driving a reciprocating load includes a stator, a coil, an armature and a commutation circuit. The stator has a magnetically permeable core with an air gap. The coil is wound around a portion of the stator and energized with a non-constant voltage for producing a non-constant magnetic flux in the stator and the air gap. The armature supports a permanent magnet having a substantial portion located in the air gap. The interaction of the magnetic field of the magnet and the non-constant flux in the air gap produces a force on the armature. The armature is connected to the load and reciprocates with respect to the stator. The circuit controls the coil such that at least one end of the magnet passes outside the region of substantially uniform flux density within the air gap during a portion of the motion of the armature.

摘要翻译： 用于驱动往复运动负载的电动线性电动机包括定子，线圈，电枢和换向电路。 定子具有带有气隙的导磁芯。 线圈缠绕在定子的一部分上，并以非恒定电压激励，以在定子和气隙中产生非恒定的磁通量。 电枢支撑具有位于气隙中的大部分的永磁体。 磁体的磁场与气隙中的非恒定磁通的相互作用在电枢上产生一个力。 电枢连接到负载并相对于定子往复运动。 电路控制线圈，使得磁体的至少一端在电枢的运动的一部分期间通过气隙内的大致均匀的磁通密度区域。

公开(公告)号：US06809435B2

公开(公告)日：2004-10-26

申请号：US10185505

申请日：2002-06-28

申请人： Thomas Reinhardt

发明人： Thomas Reinhardt

IPC分类号： H02K4100

CPC分类号： H02K41/03 ,  H02K7/102

摘要： A mechanism for compensating the gravitational force acting on a slider of a linear motor, in particular of an electro-magnetic direct linear motor, and acting on a load to be carried and moved by the slider. To compensate for the gravitational force, the mechanism exhibits a spring element, which exerts an elastic restoring force against the gravitational force on the slider.

摘要翻译： 用于补偿作用在直线电动机的滑块上的重力的机构，特别是电磁直接线性电动机的作用在由滑块承载和移动的负载上的重力。 为了补偿重力，该机构呈现弹簧元件，其弹性抵抗滑块上的重力作用。

公开(公告)号：US06800966B2

公开(公告)日：2004-10-05

申请号：US10032358

申请日：2001-12-21

申请人： Mikhail Godkin

发明人： Mikhail Godkin

IPC分类号： H02K4100

CPC分类号： H02K41/031 ,  H01F7/066

摘要： A linear motion device is disclosed which includes an armature assembly, and a field assembly which includes a plurality of permanent magnets each having a length, and a plurality of pole pieces each having a length. The ratio between the length of the plurality of permanent magnets and the length of the plurality of pole pieces is tailored to achieve a constant force versus stroke characteristic, when sinusoidal commutation is used.

摘要翻译： 公开了一种直线运动装置，其包括电枢组件和包括多个永久磁体的磁场组件，每个永磁体均具有长度，并且多个极片各自具有一定的长度。 当使用正弦换向时，多个永磁体的长度和多个极片的长度之间的比率被调整为实现恒定的力与行程特性。

公开(公告)号：US06791215B2

公开(公告)日：2004-09-14

申请号：US10455779

申请日：2003-06-05

申请人： Delbert Tesar

发明人： Delbert Tesar

IPC分类号： H02K4100

CPC分类号： F16H25/2252 ,  F16H25/205 ,  F16H2025/2078 ,  H02K7/06 ,  H02K2213/06 ,  Y10T74/186

摘要： In varying embodiments, the fault tolerant linear actuator of the present invention is a new and improved linear actuator with fault tolerance and positional control that may incorporate velocity summing, force summing, or a combination of the two. In one embodiment, the invention offers a velocity summing arrangement with a differential gear between two prime movers driving a cage, which then drives a linear spindle screw transmission. Other embodiments feature two prime movers driving separate linear spindle screw transmissions, one internal and one external, in a totally concentric and compact integrated module.

摘要翻译： 在不同的实施例中，本发明的容错线性致动器是具有容错和位置控制的新的和改进的线性致动器，其可以包括速度求和，力求和或两者的组合。 在一个实施例中，本发明提供了一种速度求和装置，其中两个原动机之间的差速齿轮驱动保持架，然后驱动线性主轴螺杆传动。 其它实施例的特征在于两个原动机在完全同心且紧凑的集成模块中驱动单独的线性主轴螺杆传动装置，一个内部和一个外部驱动装置。

公开(公告)号：US06791214B2

公开(公告)日：2004-09-14

申请号：US10320481

申请日：2002-12-17

申请人： Nobushige Korenaga

发明人： Nobushige Korenaga

IPC分类号： H02K4100

CPC分类号： G03F7/70758 ,  H02K41/031

摘要： A moving-magnet, linear motor which substantially produces no cogging force is provided. The moving-magnet, linear motor has a mover and a stator. The mover has a plurality of permanent magnets orderly disposed along the traveling direction of the mover. The stator has a toothed iron-core having a plurality of teeth and a plurality of coils wound around the teeth thereof. The permanent magnets are disposed such that the two longitudinal ends of each permanent magnet are skewed with respect to each other by a tooth pitch of the toothed iron-core.

摘要翻译： 提供了基本上不产生齿槽力的移动磁体线性马达。 移动磁铁线性电动机具有动子和定子。 动子具有沿移动器行进方向有序地设置的多个永磁体。 定子具有带齿的铁芯，其具有多个齿和围绕其齿缠绕的多个线圈。 这些永久磁铁被设置成使得每个永磁体的两个纵向端部相对于彼此具有齿形铁芯的齿距而倾斜。

公开(公告)号：US06781259B2

公开(公告)日：2004-08-24

申请号：US09922144

申请日：2001-08-03

申请人： Dirk Hente

发明人： Dirk Hente

IPC分类号： H02K4100

CPC分类号： H02K33/18 ,  H02K41/0358

摘要： The invention relates to an electrical apparatus having an actuator including at least two permanent magnets (1, 1a) and at least one electrical coil (2) which is movably supported by means of a swing arm (3), which coil is arranged to be traversed by magnetic fields of the permanent magnets (1, 1a), the actuator having a cage (4), which encloses the coil (2) and the permanent magnets (1, 1a), as a closed magnetic return path.

摘要翻译： 本发明涉及一种具有致动器的电气设备，该致动器包括至少两个永磁体（1,1a）和至少一个电动线圈（2），该电线圈通过摆臂（3）可移动地支撑，该线圈被布置为 由永磁体（1,1a）的磁场穿过的致动器具有封闭线圈（2）和永磁体（1,1a）的保持架（4）作为闭合磁返回路径。