发明授权
US06269822B1 Installation for wet-treating substrates 失效
用于湿处理底物的装置

Installation for wet-treating substrates
摘要:
In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).
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