发明授权
- 专利标题: Installation for wet-treating substrates
- 专利标题(中): 用于湿处理底物的装置
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申请号: US09171271申请日: 1999-03-22
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公开(公告)号: US06269822B1公开(公告)日: 2001-08-07
- 发明人: Jurgen Funkhanel , Dieter Meister , Martin Weber , Felix Wehrle
- 申请人: Jurgen Funkhanel , Dieter Meister , Martin Weber , Felix Wehrle
- 优先权: DE19615108 19960417; DE19637875 19960917
- 主分类号: B08B304
- IPC分类号: B08B304
摘要:
In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).
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