发明授权
- 专利标题： Micro pump and method of producing the same
- 专利标题（中）： 微泵及其制造方法
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申请号： US09441230申请日： 1999-11-16
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公开(公告)号： US06283730B1公开(公告)日： 2001-09-04
- 发明人: Yasuhiko Sasaki , Yasuhiro Yoshimura , Akira Koide , Ryo Miyake , Naruo Watanabe , Takao Terayama , Hiroshi Mitsumaki , Yasuhiko Ishida , Tomonari Morioka
- 申请人： Yasuhiko Sasaki , Yasuhiro Yoshimura , Akira Koide , Ryo Miyake , Naruo Watanabe , Takao Terayama , Hiroshi Mitsumaki , Yasuhiko Ishida , Tomonari Morioka
- 优先权： JP10-324759 19981116
- 主分类号： F04B1700
- IPC分类号： F04B1700
摘要：
A micro pump is made compact and can prevent members constituting the micro pump from being chemically reacted with a working fluid, and a method of producing the same. After each of substrates constituting the micro pump is formed by a member containing a silicone as a main composition and a plurality of metal membranes are formed on a whole of a bonding surface of each of the substrates so as to form bonding surfaces, the bonding surfaces are cleaned, and the bonding surfaces are opposed to each other under a vacuum condition, overlapped, heated and pressed so as to be bonded. The valve portion has a beam and a protrusion for sealing as provided in the valve side, whereby a pressure applied to the protrusion becomes smaller than the bonding pressure.
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