发明授权
US06283836B1 Non-abrasive conditioning for polishing pads 失效
抛光垫的非磨料调理

Non-abrasive conditioning for polishing pads
摘要:
A method and apparatus for resurfacing a polishing pad using non-abrasive techniques. These techniques include shaving, milling, or planing the upper working surface of the polishing pad using an edged cutting tool to alter the microtexture and micro-topology of the surface to produce a desired surface contour or planarity. This precise conditioning of the microscopic features of the polishing pad surface controls dishing in workpieces during polishing.
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