发明授权
US06285102B1 Drive mechanism having a gas bearing operable under a negative pressure environment
失效
具有可在负压环境下操作的气体轴承的驱动机构
- 专利标题： Drive mechanism having a gas bearing operable under a negative pressure environment
- 专利标题（中）： 具有可在负压环境下操作的气体轴承的驱动机构
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申请号： US09541720申请日： 2000-04-03
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公开(公告)号： US06285102B1公开(公告)日： 2001-09-04
- 发明人: Takaaki Matsuoka , Teruo Asakawa
- 申请人： Takaaki Matsuoka , Teruo Asakawa
- 优先权： JP11-096148 19990402
- 主分类号： B65G4907
- IPC分类号： B65G4907
摘要：
A drive mechanism provides a friction free movement of a movable member operated under a negative pressure environment. A gas bearing arrangement movably supports the movable element relative to a stationary element. The gas bearing arrangement is configured to be operated under the negative pressure environment inside the chamber. A drive arrangement drives the movable element from outside the chamber.
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