公开(公告)号：US09268328B2

公开(公告)日：2016-02-23

申请号：US14004120

申请日：2012-03-09

申请人： Teruo Asakawa ,  Makoto Yamamoto ,  Akira Machida ,  Masaaki Kawaguchi

发明人： Teruo Asakawa ,  Makoto Yamamoto ,  Akira Machida ,  Masaaki Kawaguchi

IPC分类号： G06F7/00 ,  G06F19/00 ,  G05B19/418 ,  H01L21/67

CPC分类号： G05B19/4189 ,  G05B19/41865 ,  G05B2219/31372 ,  H01L21/67276 ,  Y02P90/12 ,  Y02P90/20 ,  Y02P90/28

摘要： A production efficiency improving apparatus includes a first communicating means for communicating information with a plurality of processing apparatuses that process objects, and a second communicating means for communicating conveyance control information, with a conveyance system comprising conveyance apparatuses for conveying the objects between the plurality of processing apparatuses. A means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus needs to send out processed objects, and the conveying timing at which the processing apparatus needs to bring in unprocessed objects. A generating means generates the control information such that the conveyance apparatus will arrive at the processing apparatus that is the destination of the communication of information at the predicted timing predicted by the means for predicting.

摘要翻译： 一种生产效率提高装置包括：第一通信装置，用于与处理物体的多个处理装置进行信息通信;以及第二通信装置，用于传送传送控制信息;传送系统，包括用于在多个处理之间传送对象的传送装置 设备。 一种用于根据第一通信装置传送的信息，预测处理装置需要发送处理对象的传送定时以及处理装置需要引入未处理对象的传送定时的装置。 发生装置产生控制信息，使得输送装置将到达作为通过预测装置预测的预测定时的信息通信的目的地的处理装置。

公开(公告)号：US06988867B2

公开(公告)日：2006-01-24

申请号：US10387467

申请日：2003-03-14

申请人： Hiroaki Saeki ,  Teruo Asakawa

发明人： Hiroaki Saeki ,  Teruo Asakawa

IPC分类号： B25J18/04

CPC分类号： B25J9/107 ,  H01L21/67742 ,  Y10T74/20354

摘要： There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer apparatus 4 comprising a transfer arm 17 which comprises: two rotating shafts 5 and 6 arranged coaxially or in parallel; a pair of first arms 7 and 8, one end portions of which are fixed to the rotating shafts 5 and 6, respectively; a pair of second arms 10 and 11, one end portions of which are connected to the other end portions of the pair of first arms 7 and 8 by means of pins, respectively; and a holding portion 14 for holding an object w to be processed, the holding portion 14 being connected to each of the other end portions of the pair of second arms 10 and 11 by means of pins, wherein the second arms 10 and 11 cross each other.

摘要翻译： 提供了一种传送装置，其能够在传送臂伸长时增加传送臂的长度，而不会在传送臂收缩时增大传送臂的尺寸。 传送装置4包括传送臂17，其包括：同轴或平行布置的两个旋转轴5和6; 一对第一臂7和8，其一端部分别固定在旋转轴5和6上; 一对第二臂10和11，其一端分别通过销与第一臂7和8的另一端连接; 以及用于保持待加工物体w的保持部分14，保持部分14通过销与每对第二臂10和11的另一个端部连接，其中第二臂10和11各自交叉 其他。

公开(公告)号：US20050112889A1

公开(公告)日：2005-05-26

申请号：US11024199

申请日：2004-12-29

申请人： Junichi Inoue ,  Teruo Asakawa ,  Kazuhiko Sugiyama

发明人： Junichi Inoue ,  Teruo Asakawa ,  Kazuhiko Sugiyama

IPC分类号： C23C14/56 ,  C23C16/54 ,  H01L21/00 ,  H01L21/04 ,  H01L21/66 ,  G01R31/26 ,  H01L21/76 ,  H01L21/302 ,  H01L21/461

CPC分类号： H01L21/67225 ,  C23C14/56 ,  C23C16/54 ,  H01L21/0405 ,  H01L21/67161 ,  H01L21/67173

摘要： The present invention provides a semiconductor device manufacturing line for applying a series of processes on a semiconductor substrate, and forming an integrated circuit on the semiconductor substrate by employing a semiconductor wafer having a diameter of 6 inches (150±3 mm: SEAJ specification) or less for the semiconductor substrate. This manufacturing line comprises two sub-lines conforming to the same specifications, each of these sub-lines is composed of a series of processing units including a film forming unit, a pattern exposure unit, an etching unit, and a test unit. In at least one pattern exposure unit and one etching unit, fine processing of 0.3 μm or less can be performed.

摘要翻译： 本发明提供了一种用于在半导体衬底上施加一系列工艺的半导体器件制造线，并且通过采用直径为6英寸（150±3mm：SEAJ规格）的半导体晶片或半导体衬底上形成集成电路， 较少用于半导体衬底。 该制造线包括符合相同规格的两条子线，这些子线中的每一条由包括成膜单元，图案曝光单元，蚀刻单元和测试单元的一系列处理单元组成。 在至少一个图案曝光单元和一个蚀刻单元中，可以执行0.3μm或更小的精细处理。

公开(公告)号：US6068704A

公开(公告)日：2000-05-30

申请号：US969945

申请日：1997-11-25

申请人： Hiroaki Saeki ,  Teruo Asakawa

发明人： Hiroaki Saeki ,  Teruo Asakawa

IPC分类号： B25J9/06 ,  B25J17/00 ,  B65G49/07 ,  C23C16/54 ,  H01L21/677 ,  C23C16/00

CPC分类号： C23C16/54 ,  H01L21/67742 ,  Y10S414/139

摘要： A transfer arm apparatus has first, second, and third arms. The second arm has a proximal link pivotally mounted on the distal end of the first arm, and first and second links connecting the proximal link and the third arm to constitute a link mechanism. The first and second links form a first pair of parallel links, and the proximal link and the third link form a second pair of parallel links connecting the first pair of parallel links. A transmission is contained in the first arm, and has an axial shaft and a hollow axial shaft coaxially arranged at the distal end of the first arm. The axial shaft transmits a rotational driving force to the first pair of parallel links, and the hollow axial shaft transmits a rotational driving force to the second pair of parallel links through the proximal link.

摘要翻译： 传送臂装置具有第一，第二和第三臂。 第二臂具有枢转地安装在第一臂的远端上的近端连杆，以及连接近端连杆和第三臂以构成连杆机构的第一和第二连杆。 所述第一和第二连杆形成第一对平行连杆，并且所述近端连杆和所述第三连杆形成连接所述第一对平行连杆的第二对并联连杆。 变速器包含在第一臂中，并且具有同轴地布置在第一臂的远端处的轴向轴和中空轴向轴。 轴向轴将旋转驱动力传递到第一对平行连杆，并且空心轴向轴通过近端连杆传递旋转驱动力到第二对平行连杆。

公开(公告)号：US6053983A

公开(公告)日：2000-04-25

申请号：US71833

申请日：1998-05-04

申请人： Hiroaki Saeki ,  Teruo Asakawa

发明人： Hiroaki Saeki ,  Teruo Asakawa

IPC分类号： H01L21/00 ,  C23C16/00 ,  B65G23/00 ,  B66C23/00

CPC分类号： H01L21/67265

摘要： A plurality of projections 21 is disposed on a inner surface of a lid 20 which is detachably attached to a carrier body 10. Each projection 21 has a tapered end part 22 with inclined surfaces 23, 24. The surfaces 23, 24 are in the form of semitransparent mirror. A Light emitting device 47 projects light beam which travels horizontally to the projection 21 from outside of the lid 20. When a wafer is not present in slots 15 of the carrier body, the light beam travels to upper and lower adjacent photoelectric devices 48, 48 via the upper and lower adjacent projections 21. The semitransparent mirror 23, 24 changes the light beam traveling direction. When the wafer is present in the slots 15, the light beam is intercepted by the wafer, and the photoelectric devices 48 does not receive the light beam. In aforementioned manner, whether a wafer is present or not in the slots 15 can be detected.

摘要翻译： 多个突起21设置在可拆卸地附接到托架主体10的盖20的内表面上。每个突起21具有倾斜表面23,24的锥形端部22.表面23,24的形式 的半透明镜。 发光装置47投射从盖20的外部水平地向突起21行进的光束。当晶片不存在于载体主体的狭槽15中时，光束行进到上下相邻的光电装置48,48 半透明反射镜23,24改变光束行进方向。 当晶片存在于槽15中时，光束被晶片截获，并且光电器件48不接收光束。 以上述方式，可以检测槽15中是否存在晶片。

公开(公告)号：US5934856A

公开(公告)日：1999-08-10

申请号：US837948

申请日：1997-04-28

申请人： Teruo Asakawa ,  Hiroaki Saeki

发明人： Teruo Asakawa ,  Hiroaki Saeki

IPC分类号： B65G49/07 ,  C23C16/54 ,  F16K51/02 ,  H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67161 ,  C23C16/54 ,  F16K51/02 ,  H01L21/67126 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  Y10S414/139

摘要： Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease of the number of the vacuum process chambers, without entailing any change in a load-lock chamber and a transfer arm. The transfer arm has a minimum radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers and a maximum arm reach such that the arm can deliver an object to-be-treated between each vacuum process chamber and a transfer chamber of a maximum size corresponding to a maximum number of vacuum process chambers. Thus, even though the number of the vacuum process chambers are increased or decreased with the change of the processes, it is necessary only that the shape and size of the transfer chamber be changed, and the other components, such as the load-lock chamber, transfer arm, etc., can be used in common, so that the manufacture and assembling of the system are very easy, ensuring a reduction in cost. Also, reduced-pressure treatment apparatus and a normal-pressure treatment apparatus are connected to each other by means of the load-lock chamber for replacement between the atmosphere and vacuum.

摘要翻译： 当处理的种类或顺序改变时，真空处理室的数量增加或减少，并且传送室的形状和尺寸随着真空处理室的数量的增加或减少而改变，而不会导致任何变化 负载锁定室和传送臂。 传送臂具有最小的旋转半径，使得臂可以在传送室中旋转，其最小尺寸对应于最小数量的真空处理室，并且最大臂达到，使得臂可以传递被处理物体 在每个真空处理室和对应于最大数量的真空处理室的最大尺寸的传送室之间。 因此，尽管随着工艺的变化，真空处理室的数量增加或减少，但只需要改变传送室的形状和尺寸，并且其它部件如负载锁定室 ，传送臂等，可以共同使用，使系统的制造和组装非常容易，确保降低成本。 此外，减压处理装置和常压处理装置通过用于更换大气和真空的装载锁定室彼此连接。

公开(公告)号：US4555650A

公开(公告)日：1985-11-26

申请号：US481737

申请日：1983-04-04

申请人： Teruo Asakawa

发明人： Teruo Asakawa

IPC分类号： H01L21/68 ,  G03F7/20 ,  H02K41/02 ,  H02K41/00

CPC分类号： G03F7/70716 ,  G03F7/70758 ,  H02K41/031 ,  H02K2201/18

摘要： A device for positioning a semiconductor substrate is provided comprising magnetic field group formed from a plurality of magnetic fields disposed on a plane in a two-dimensional array. The magnetic fields are provided with a perpendicular orientation relative to the plane and adjacent magnetic fields are directed in alternate directions. Coil sets are formed of a plurality of coils, the coils having a specific dimensional relationship with the magnetic field array. Coil groups are formed by fixedly securing a plurality of these coil sets to each other the coil groups being disposed within the magnetic field group so as to be freely movable along the plane. Electric current is applied to the coils which generates a force in each coil set so as to move the coil set in either one of the longitudinal and lateral directions of the array of magnetic fields, whereby a current-motion converter and a driving device making use of the converter can be formed.

摘要翻译： 提供一种用于定位半导体衬底的装置，包括由设置在二维阵列的平面上的多个磁场形成的磁场组。 磁场相对于平面具有垂直定向，并且相邻的磁场沿着交替的方向被引导。 线圈组由多个线圈形成，线圈与磁场阵列具有特定的尺寸关系。 线圈组通过将多个这些线圈组彼此固定地固定而形成，线圈组被布置在磁场组内，以便能够沿着平面自由移动。 对线圈施加电流，在每个线圈组中产生力，以使线圈组沿磁场阵列的纵向和横向方向移动，由此使电流运动转换器和使用的驱动装置 的转换器。

公开(公告)号：US4476420A

公开(公告)日：1984-10-09

申请号：US443471

申请日：1982-11-22

申请人： Teruo Asakawa

发明人： Teruo Asakawa

IPC分类号： G01D5/244 ,  G01D5/245 ,  G05B19/39 ,  G05D3/12 ,  G05B1/01

CPC分类号： G05B19/39 ,  G05D3/121

摘要： Positioning of a movable body can be achieved at a high resolution by making use of two position signals generated by a position detector, whose magnitudes are sinusoidal functions having different phases of the position of the movable body. On the basis of the two sinusoidal position signals, two bi-level digital position signals having different phase from each other are derived, and digital control for movement of the movable body is effected by making use of these two bi-level digital position signals until the movable body is brought into the proximity of a desired position. Thereafter, control is switched from the digital control to analog control for movement of the movable body, in which a position signal whose manitude is a sinusoidal function of the position of the movable body and has a zero-cross point at the desired position is used as a reference position signal. This reference position signal can be synthesized from the two position signals generated by the position detector by means of a simple signal synthesizer circuit according to the present invention. The signal synthesizer circuit comprises two multiplier type digital-analog converters, each of which is applied with a digital input signal and an analog input signal such as, for example, the above-mentioned sinusoidal position signal generated by the position detector and generates an analog output signal that is product including an algebraic sign of the digital input signal and the analog input signal, and an adder having the respective analog output signals of the two multiplier type digital-analog converters applied to its input. By appropriately selecting the digital values of the digital input signals, a desired reference position signal can be derived at the output of the adder.

摘要翻译： 可以通过利用由位置检测器产生的两个位置信号以高分辨率来实现移动体的定位，位置检测器的大小是具有不同移动体位置的正弦函数。 基于两个正弦位置信号，导出具有彼此不同相位的两个双电平数字位置信号，并且通过利用这两个双电平数字位置信号来实现移动体的移动的数字控制，直到 可移动体被带到所需位置附近。 此后，将控制从数字控制切换到可移动体的运动的模拟控制，其中使用其位置信号，其位置信号是可移动体的位置的正弦函数并且在期望位置处具有零交叉点 作为参考位置信号。 可以通过根据本发明的简单信号合成器电路由位置检测器产生的两个位置信号来合成该参考位置信号。 信号合成器电路包括两个乘法器型数模转换器，每个转换器应用数字输入信号和模拟输入信号，例如由位置检测器产生的上述正弦位置信号，并产生模拟 输出信号，其是包括数字输入信号和模拟输入信号的代数符号的乘积，以及加法器，其具有应用于其输入的两个乘法器型数模转换器的相应模拟输出信号。 通过适当地选择数字输入信号的数字值，可以在加法器的输出端导出期望的参考位置信号。

公开(公告)号：US09696711B2

公开(公告)日：2017-07-04

申请号：US14232980

申请日：2012-07-12

申请人： Teruo Asakawa ,  Hirofumi Yamaguchi ,  Supika Mashiro ,  Toshihiko Iijima ,  Hirokazu Narisawa ,  Kou Fujimura

发明人： Teruo Asakawa ,  Hirofumi Yamaguchi ,  Supika Mashiro ,  Toshihiko Iijima ,  Hirokazu Narisawa ,  Kou Fujimura

IPC分类号： G06F19/00 ,  G04F1/00 ,  H01L21/00 ,  G05B19/402 ,  G05B19/418

CPC分类号： G05B19/402 ,  G05B19/41865 ,  G05B2219/2609 ,  G05B2219/32078 ,  G05B2219/32272 ,  G05B2219/32277 ,  G05B2219/32311 ,  G05B2219/49202 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/28 ,  Y02P90/285

摘要： A processing indicating device to improve the efficiency of processing on an object. The device includes a first communication unit which communicates information with a plurality of processing devices for processing the object and a second communication unit which communicates information with a conveyance controlling device controlling conveying of the object to the plurality of processing devices. An arrival time predicting unit predicts on the basis of information received by the second communication unit, the time when the conveying device arrives at one of the processing devices. In addition, a finish time predicting unit receives information and predicts the time when the processing on the object in the one processing device finishes. A processing indicating unit causes processing control information that orders the execution of device state improvement treatment to be transmitted to the one processing device on the basis of the predicted respective times.

公开(公告)号：US20140358271A1

公开(公告)日：2014-12-04

申请号：US14232980

申请日：2012-07-12

申请人： Teruo Asakawa ,  Hirofumi Yamaguchi ,  Supika Mashiro ,  Toshihiko Iijima ,  Hirokazu Narisawa ,  Kou Fujimura

发明人： Teruo Asakawa ,  Hirofumi Yamaguchi ,  Supika Mashiro ,  Toshihiko Iijima ,  Hirokazu Narisawa ,  Kou Fujimura

IPC分类号： G05B19/402

CPC分类号： G05B19/402 ,  G05B19/41865 ,  G05B2219/2609 ,  G05B2219/32078 ,  G05B2219/32272 ,  G05B2219/32277 ,  G05B2219/32311 ,  G05B2219/49202 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/28 ,  Y02P90/285

摘要： A processing indicating device to improve the efficiency of processing on an object. The device includes a first communication unit which communicates information with a plurality of processing devices for processing the object and a second communication unit which communicates information with a conveyance controlling device controlling conveying of the object to the plurality of processing devices. An arrival time predicting unit predicts on the basis of information received by the second communication unit, the time when the conveying device arrives at one of the processing devices. In addition, a finish time predicting unit receives information and predicts the time when the processing on the object in the one processing device finishes. A processing indicating unit causes processing control information that orders the execution of device state improvement treatment to be transmitted to the one processing device on the basis of the predicted respective times.

摘要翻译： 一种处理指示装置，用于提高对物体的处理效率。 该装置包括：第一通信单元，其与多个用于处理该对象的处理装置进行通信;第二通信单元，其与传送控制装置通信信息，该输送控制装置控制对该多个处理装置的传送。 到达时间预测单元基于由第二通信单元接收的信息，传送设备到达处理设备之一的时间来预测。 此外，完成时间预测单元接收信息并预测在一个处理设备中的对象的处理完成的时间。 处理指示单元基于预测的各个时间，使得命令执行设备状态改善处理的处理控制信息被发送到一个处理设备。