发明授权
- 专利标题: Structure and process for making substrate packages for high frequency application
- 专利标题(中): 制造高频应用基板封装的结构和工艺
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申请号: US09471563申请日: 1999-12-23
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公开(公告)号: US06291272B1公开(公告)日: 2001-09-18
- 发明人: Ajay P. Giri , John U. Knickerbocker , David C. Long , Subhash L. Shinde , Lisa M. Studzinski , Rao V. Vallabhaneni
- 申请人: Ajay P. Giri , John U. Knickerbocker , David C. Long , Subhash L. Shinde , Lisa M. Studzinski , Rao V. Vallabhaneni
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
A process for fabricating a microelectronic structure. The process comprises processing a metal carrier having a top surface and a bottom surface, wherein the top surface and the bottom surface are processed to promote adhesion, forming a dielectric layer around the metal carrier, wherein the dielectric layer substantially covers the top surface and the bottom surface of the metal carrier, and applying a first patterned layer of conductive material to the microelectronic structure. In one preferred embodiment, the process further comprises comprising sintering the metal carrier, the dielectric layer, and the first patterned layer of conductive material. In one preferred embodiment, the process further comprises forming a via hole through the metal carrier before the forming of the dielectric layer around the metal carrier, wherein the forming of the dielectric layer comprises forming the dielectric layer inside the via hole.
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