Invention Grant
US06294771B2 Electrically heated substrate with multiple ceramic parts each having different volume resitivities
有权
具有多个陶瓷部件的电加热衬底，每个陶瓷部件具有不同的体积电阻率
- Patent Title: Electrically heated substrate with multiple ceramic parts each having different volume resitivities
- Patent Title (中): 具有多个陶瓷部件的电加热衬底，每个陶瓷部件具有不同的体积电阻率
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Application No.: US09753481Application Date: 2001-01-03
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Publication No.: US06294771B2Publication Date: 2001-09-25
- Inventor: Yuji Katsuda , Kiyoshi Araki , Tsuneaki Ohashi
- Applicant: Yuji Katsuda , Kiyoshi Araki , Tsuneaki Ohashi
- Priority: JP10-013518 19980109; JP10-300736 19981022
- Main IPC: H01L21205
- IPC: H01L21205
Abstract:
A heater comprising a substrate having a heating surface to treat a substance to be heated on the substrate, a heating element embedded in the substrate, and a resistance control part, wherein the substrate comprises a first ceramic material and the resistance control part comprises a second ceramic material which has higher volume resistivity than that of the first ceramics.
Public/Granted literature
- US20010006172A1 Electrically heated substrate with multiple ceramic parts each having different volume resitivities Public/Granted day:2001-07-05
Information query
