发明授权
- 专利标题: Integrated circuit with insulating spacers separating borderless contacts from the well
- 专利标题(中): 集成电路与绝缘垫片分隔无缝触点与井
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申请号: US09310467申请日: 1999-05-12
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公开(公告)号: US06294823B1公开(公告)日: 2001-09-25
- 发明人: Mohamed Arafa , Scott Thompson
- 申请人: Mohamed Arafa , Scott Thompson
- 主分类号: H01L2900
- IPC分类号: H01L2900
摘要:
An improved integrated circuit and method for making it are described. The integrated circuit includes a shallow trench isolation structure formed adjacent to a well. A borderless contact makes electrical contact to a conductive region formed on the well and an insulating spacer is formed adjacent to a sidewall of the conductive region.
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