发明授权
US06294922B1 Probe for testing a semiconductor integrated circuit 失效
用于测试半导体集成电路的探头

  • 专利标题: Probe for testing a semiconductor integrated circuit
  • 专利标题(中): 用于测试半导体集成电路的探头
  • 申请号: US08773252
    申请日: 1996-12-23
  • 公开(公告)号: US06294922B1
    公开(公告)日: 2001-09-25
  • 发明人: Masao OkuboKazumasa OkuboHiroshi Iwata
  • 申请人: Masao OkuboKazumasa OkuboHiroshi Iwata
  • 优先权: JP8-051053 19960213; JP8-071512 19960229; JP8-141081 19960510
  • 主分类号: G01R3102
  • IPC分类号: G01R3102
Probe for testing a semiconductor integrated circuit
摘要:
A first assembly configuration features in including: a plurality of probes having a buckling portion to buckle, upon a contact by an end of a contact portion onto an electrode of semiconductor integrated circuit; a first board provided with a first wiring pattern connected with a connecting portion of the probe; a second board removably fastened with the first board and provided with a second wiring pattern connected with the first wiring pattern; housing members mounted with the second board for holding the contact portion of the probe. Next configuration features in including: two kinds of probes; measurement probes and connection probes anew, and a plurality of connection probes include buckling portions to buckle, upon a contact by an end of contact portion onto the wiring pattern provided with the first board when inserted into holes provided with the a second board; wherein through holes provided with the second board are positioned to align to the arrangement of wiring pattern provided with the first board. Thereby, undesirable deviation of contact point by the probe is avoided and a suitable contact pressure is preferably kept, and further convenience in the work of exchanging damaged probes is brought about.
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