发明授权
US06297898B1 Optical deflection device 失效
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Optical deflection device
摘要:
An optical deflection device for deflecting light by a mirror mounted on the tip of a rod-like torsion spring which oscillates at near resonance frequency. An optical deflection device which produces a large amplitude by exerting control to avoid variation in the natural oscillation frequency of the torsion spring (including mirror) regardless of temperature fluctuation.
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