发明授权
US06306676B1 Method of making self-aligned, high-enegry implanted photodiode for solid-state image sensors
失效
制造用于固态图像传感器的自对准高掺杂光电二极管的方法
- 专利标题: Method of making self-aligned, high-enegry implanted photodiode for solid-state image sensors
- 专利标题(中): 制造用于固态图像传感器的自对准高掺杂光电二极管的方法
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申请号: US08628063申请日: 1996-04-04
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公开(公告)号: US06306676B1公开(公告)日: 2001-10-23
- 发明人: Eric G. Stevens , Stephen L. Kosman , David L. Losee , James P. Lavine
- 申请人: Eric G. Stevens , Stephen L. Kosman , David L. Losee , James P. Lavine
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
A method and apparatus of making high energy implanted photodiode that is self aligned with the transfer gate, the high energy implant is defined by providing a substrate, or well, of a first conductivity type, defining a charge coupled device within the substrate, or well, such that gate electrode layers are allowed to exist over areas to contain photodiodes during construction of the charge coupled device, patterning a masking layer to block high energy implants such that openings in the masking layer are formed over the areas of the photodiodes, anisotropically etching down through the gate electrode over the photodiodes to the gate dielectric material, implanting photodiodes with high-energy ions of a second conductivity type opposite the first conductivity type and creating a pinned photodiode by employing a shallow implant of the first conductivity type. The apparatus made by this method yields a photodiode employing high energy ions to form the P/N junction that is self aligned with the transfer gate.
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