发明授权
- 专利标题: Batch type heat-treating method
- 专利标题(中): 批式热处理方法
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申请号: US09532901申请日: 2000-03-22
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公开(公告)号: US06306764B1公开(公告)日: 2001-10-23
- 发明人: Hitoshi Kato , Takako Sano , Yukio Yamamoto , Hiroyuki Kikuchi
- 申请人: Hitoshi Kato , Takako Sano , Yukio Yamamoto , Hiroyuki Kikuchi
- 优先权: JP11-077169 19990323; JP12-013531 20000121
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
In a batch type vertical heat-treating method, first, product wafers and dummy wafers are set to be stacked on an upstream side of a flow of a process gas, in heat treatment, within main holding positions of a holder. The dummy substrates are set more downstream of the process gas than the product wafers. The product wafers and the dummy wafers are set in the holder in a total number smaller than a total number of the main holding positions corresponding to a maximum number of wafers that can be held by the holder, and the holder is in a partially loaded state. The partially loaded holder is loaded in a process vessel, and the product wafers are processed in the process vessel.