Film deposition apparatus
    1.
    发明授权
    Film deposition apparatus 有权
    膜沉积装置

    公开(公告)号:US08721790B2

    公开(公告)日:2014-05-13

    申请号:US12963673

    申请日:2010-12-09

    摘要: A film deposition apparatus includes a turntable provided in the chamber and having on a first surface a substrate receiving area in which a substrate is placed; first and second reaction gas supplying portions supplying first and second reaction gases to the first surface, respectively; a separation gas supplying portion provided between the first reaction gas supplying portion and the second reaction gas supplying portion and supplying a separation gas that separates the first reaction gas and the second reaction gas; an evacuation port that evacuates the chamber; a space defining member provided for at least one of the first and second reaction gas supplying portions and defining a first space between the at least one of the first and second reaction gas supplying portions and the turntable and a second space so that the separation gas is likely to flow through the second space rather than the first space.

    摘要翻译: 一种成膜装置,包括设置在所述室中并在第一表面上具有放置基板的基板接收区域的转盘; 分别向第一表面供应第一和第二反应气体的第一和第二反应气体供应部分; 分离气体供给部,设置在第一反应气体供给部和第二反应气体供给部之间,供给分离第一反应气体和第二反应气体的分离气体; 疏散室的疏散口; 设置在所述第一反应气体供给部和所述第二反应气体供给部中的至少一个的空间限定部件,在所述第一反应气体供给部和所述第二反应气体供给部中的至少一个与所述转台之间形成第一空间, 可能流经第二空间而不是第一空间。

    Electric motorcycle
    3.
    发明授权
    Electric motorcycle 有权
    电动摩托车

    公开(公告)号:US08443926B2

    公开(公告)日:2013-05-21

    申请号:US13057179

    申请日:2009-09-03

    IPC分类号: B62K11/00 B62M7/00

    摘要: An electric motorcycle in which a power drive unit and a motive power generation motor for traveling are secured to a swing arm swinging around a pivot shaft, and power from a battery is supplied through the power drive unit to the motive power generation motor. A hollow inside of the swing arm is partitioned into an air introducing space and an equipment fixing space by a partition wall. The power drive unit is secured in the equipment fixing space so as to be in close contact with the partition wall and a fin extending from the partition wall to the air introducing space are formed at a fixing surface of the air introducing space to which the power drive unit is attached.

    摘要翻译: 一种电动摩托车,其中动力驱动单元和用于行进的动力发电电动机固定在围绕枢轴摆动的摆臂上,并且来自电池的动力通过动力驱动单元提供给动力发电电动机。 摆臂的中空内部通过分隔壁分隔成空气导入空间和设备固定空间。 电力驱动单元被固定在设备固定空间中以与分隔壁紧密接触,并且在空气引入空间的固定表面处形成从分隔壁延伸到空气引入空间的翅片, 驱动单元被连接。

    FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    4.
    发明申请
    FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS 审中-公开
    薄膜沉积装置和基板处理装置

    公开(公告)号:US20130087097A1

    公开(公告)日:2013-04-11

    申请号:US13644697

    申请日:2012-10-04

    摘要: An apparatus is configured to include a gas supplying part configured to supply a plasma generating gas on a surface on a substrate mounting area side in a turntable and an antenna configured to convert the plasma generating gas to plasma by induction coupling and provided facing the surface of the substrate mounting area side in the turntable so as to extend from a center part to an outer edge part of the turntable. The antenna is arranged so as to have a distance from the turntable in the substrate mounting area not less than 3 mm longer on the center part side than on the outer edge part side.

    摘要翻译: 一种装置,被配置为包括气体供应部件,其构造成在转盘的基板安装区域侧的表面上提供等离子体产生气体,以及天线,被配置为通过感应耦合将等离子体产生气体转换成等离子体, 旋转台中的基板安装区域侧从转台的中心部分延伸到外边缘部分。 天线布置成在中心部分侧比在外边缘部分侧不小于3mm的基板安装区域中的转盘具有距离。

    Drainage structure in fuel cell motorcycle
    5.
    发明授权
    Drainage structure in fuel cell motorcycle 失效
    燃料电池摩托车排水结构

    公开(公告)号:US08118129B2

    公开(公告)日:2012-02-21

    申请号:US12041177

    申请日:2008-03-03

    摘要: A layout for an exhaust pipe which also serves as a drainage pipe which prevents splashing of water generated in a fuel cell toward a passenger or splashing toward a tire. Humid excessive gas supplied from a fuel cell is diluted in a dilution box by off-gas discharged from the fuel cell and is used for humidifying air in the humidifier. An exhaust pipe is connected to the dilution box, and diluted hydrogen gas is discharged via the exhaust pipe. Vapor mixed in hydrogen gas is condensed in the exhaust pipe and turned into water, which is drained through the exhaust pipe that extends rearwardly of a vehicle body through the interior of a power unit. A discharge port of the exhaust pipe (which is also a drainage port for water generated in the fuel cell) is positioned at the widthwise center of the vehicle body.

    摘要翻译: 排气管的布局,其还用作排水管,其防止在燃料电池中产生的水飞向乘客或向轮胎飞溅。 从燃料电池供应的潮湿的过量气体通过从燃料电池排出的废气在稀释箱中稀释,并用于加湿器中的空气加湿。 排气管连接到稀释盒,稀释的氢气经排气管排出。 在氢气中混合的蒸汽在排气管中被冷凝并变成水,其通过从动力单元的内部从车身向后延伸的排气管排出。 排气管(其也是在燃料电池中产生的水的排水口)的排出口位于车体的宽度方向的中心。

    FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER READABLE STORAGE MEDIUM
    7.
    发明申请
    FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER READABLE STORAGE MEDIUM 审中-公开
    薄膜沉积装置,薄膜​​沉积方法和计算机可读存储介质

    公开(公告)号:US20110039026A1

    公开(公告)日:2011-02-17

    申请号:US12852545

    申请日:2010-08-09

    IPC分类号: C23C14/22 C23C16/44

    摘要: A silicon oxide film is deposited by rotating a rotation table on which a wafer W is placed to allow BTBAS gas to be adsorbed on an upper surface of the wafer W and supply a O3 gas to the upper surface of the wafer W for allowing the BTBAS gas adsorbed on the upper surface of the wafer W to react. After depositing the silicon oxide film, a reforming process is performed every deposition cycle by supplying a plasma of Ar gas to the silicon oxide film on the wafer from an activated gas injector.

    摘要翻译: 通过旋转放置晶片W的旋转台来沉积氧化硅膜,以允许BTBAS气体吸附在晶片W的上表面上,并将O 3气体供应到晶片W的上表面,以允许BTBAS 吸附在晶片W的上表面上的气体反应。 在沉积氧化硅膜之后,通过从活化气体注入器向晶片上的氧化硅膜提供Ar气体的等离子体,进行每个沉积循环的重整过程。

    Airbag jacket for a vehicle rider
    9.
    发明授权
    Airbag jacket for a vehicle rider 有权
    汽车外套

    公开(公告)号:US07774867B2

    公开(公告)日:2010-08-17

    申请号:US12009510

    申请日:2008-01-18

    IPC分类号: A41D13/00

    CPC分类号: A41D13/018 Y10S2/03

    摘要: An airbag jacket, to be fitted in a rider jacket, includes an airbag body configured to fill with gas from an inflator operatively connected with the airbag body. The airbag body includes a flat front piece, a flat back piece substantially identical to the flat front piece; the flat front and back pieces having an opening formed therein for permitting an user of the airbag jacket to pass his or her head therethrough. The flat front and back pieces are joined together along a peripheral boundary thereof and along a peripheral boundary of the opening by sewing or bonding so as provide a plurality of continuously formed body covering portions including at least a back covering portion, a shoulder covering portion and a front covering portion.

    摘要翻译: 安装在骑手护套中的安全气囊夹套包括安全气囊本体,其构造成从与气囊主体可操作地连接的充气机填充气体。 气囊本体包括平坦的前部件,与平坦的前部件基本相同的平的后部件; 平坦的前部和后部具有形成在其中的开口,用于允许安全气囊护套的使用者将他或她的头部通过。 平坦的前后片通过缝合或接合沿着其周边边界并沿着开口的周边边界连接在一起,从而提供多个连续成形的主体覆盖部分,其至少包括后覆盖部分,肩部覆盖部分和 前覆盖部分。

    Image sensor test system
    10.
    发明授权
    Image sensor test system 有权
    图像传感器测试系统

    公开(公告)号:US07479779B2

    公开(公告)日:2009-01-20

    申请号:US10599698

    申请日:2004-06-08

    IPC分类号: G01R31/28

    CPC分类号: H04N17/002 G01R31/2893

    摘要: An image sensor test system (10) bringing input/output terminals of an image sensor into contact with a contact (61) of a test head (60), emitting light to alight receiving surface of the image sensor from a light source (80) and, while doing so, inputting/outputting electrical signals between the contact (61) of the test head (60) and the image sensor so as to test the optical properties of the image sensor, provided with a loader use inverting device (32) for inverting an image sensor loaded into a supply tray stacker in a state with the light receiving surface facing upward, a contact arm (43) for gripping a back surface of an opposite side to the light receiving surface of the image sensor and moving the image sensor to bring the image sensor into contact with a contact (61) of the test head (60) in the state with the light receiving surface facing downward, and an unloader use inverting device inverting and unloaded the tested image sensor.

    摘要翻译: 一种图像传感器测试系统(10),其将图像传感器的输入/输出端子与测试头(60)的触点(61)接触,从光源(80)向所述图像传感器的接收表面发射光, 并且在这样做时,在测试头(60)的触点(61)和图像传感器之间输入/输出电信号,以便测试装有图像传感器的光学特性的装载器使用倒转装置(32) 用于将处于受光面朝上的状态下装载到供给盘堆叠器中的图像传感器反转;用于夹持与图像传感器的光接收表面相反侧的背面并移动图像的接触臂(43) 传感器,使得图像传感器在受光面朝下的状态下与测试头(60)的触点(61)接触,并且卸载器使用翻转装置翻转和卸载测试的图像传感器。