发明授权
- 专利标题： Topographical electrostatic protection grid for sensors
- 专利标题（中）： 传感器的地形静电防护网格
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申请号： US09223707申请日： 1998-12-30
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公开(公告)号： US06326227B1公开(公告)日： 2001-12-04
- 发明人: Danielle A. Thomas , Ming Fang
- 申请人： Danielle A. Thomas , Ming Fang
- 主分类号： H01L2100
- IPC分类号： H01L2100
摘要：
A structure and method for dissipating charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry a gap being formed conformally between adjacent plates and a topographic discharge grid over the underlying dielectric layer and wherein the topographic discharge grid fills at least a portion of the gap between the plates over the dielectric layer and diffuses electrostatic charges at the surface of the integrated circuit.