发明授权
US06326639B1 Heterostructure semiconductor radiation detector for wavelengths from the infrared spectral range
有权
异质结构半导体辐射检测器,用于来自红外光谱范围的波长
- 专利标题: Heterostructure semiconductor radiation detector for wavelengths from the infrared spectral range
- 专利标题(中): 异质结构半导体辐射检测器,用于来自红外光谱范围的波长
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申请号: US09381201申请日: 1999-09-17
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公开(公告)号: US06326639B1公开(公告)日: 2001-12-04
- 发明人: Harald Schneider , Martin Walter
- 申请人: Harald Schneider , Martin Walter
- 优先权: DE19711505 19970319
- 主分类号: H01L2906
- IPC分类号: H01L2906
摘要:
The present invention relates to a semiconductor hetereostructure radiation detector for wavelengths in the infrared spectral range. The semiconductor heterostructure radiation detector is provided with an active layer composed of a multiplicity of periodically recurring single-layer systems each provided with a potential well structure having at least one quantum well with subbands (quantum well), the so-called excitation zone, which is connected on one side to a tunnel barrier zone, whose potential adjacent to the excitation zone is higher than the band-edge energy of a drift zone adjoining on the other side of the potential-well structure. The invention is characterized in that said drift zone is adjacent to a trap zone which is provided with at least one quantum-well structure containing subbands and is connected to the tunnel barrier zone of another single-layer system immediately adjacent in periodic sequence comprising an excitation zone, a drift zone, trap zone and a tunnel barrier zone, that the energy levels of said subbands of said quantum-well structures inside said excitation zone and said trap zone as well as the thickness of said tunnel barrier zone are set in such a manner that there is sufficient tunneling probability for the charge carriers to tunnel from the trap zone through the tunnel barrier zone into the excitation zone.
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