Invention Grant
US06331873B1 High-precision blooming control structure formation for an image sensor
失效
用于图像传感器的高精度起霜控制结构形成
- Patent Title: High-precision blooming control structure formation for an image sensor
- Patent Title (中): 用于图像传感器的高精度起霜控制结构形成
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Application No.: US09204483Application Date: 1998-12-03
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Publication No.: US06331873B1Publication Date: 2001-12-18
- Inventor: Barry E. Burke , Eugene D. Savoye
- Applicant: Barry E. Burke , Eugene D. Savoye
- Main IPC: H04N314
- IPC: H04N314

Abstract:
Provided is a blooming control structure for an imager and a corresponding fabrication method. The structure is produced in a semiconductor substrate in which is configured an electrical charge collection region. The electrical charge collection region is configured to accumulate electrical charge that is photogenerated in the substrate, up to a characteristic charge collection capacity. A blooming drain region is configured in the substrate laterally spaced from the charge collection region. The blooming drain region includes an extended path of a conductivity type and level that are selected for conducting charge in excess of the characteristic charge collection capacity away from the charge collection region. A blooming barrier region is configured in the substrate to be adjacent to and laterally spacing the charge collection and blooming drain regions by a blooming barrier width. This barrier width corresponds to an acute blooming barrier impurity implantation angle with the substrate. The blooming barrier region is of a conductivity type and level that is selected based on the blooming barrier width to produce a corresponding electrical potential barrier between the charge collection and blooming drain regions. This blooming control structure, and particularly the blooming barrier regions of the structure, are very precisely defined by the selected acute blooming barrier impurity implantation angle, and optionally in addition by a rotation of the blooming barrier impurity implantation, as well as a non-vertical sidewall profile of the an impurity implantation masking layer.
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