发明授权
- 专利标题: Turbo-molecular pump
- 专利标题(中): 涡轮分子泵
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申请号: US09104171申请日: 1998-06-25
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公开(公告)号: US06332752B2公开(公告)日: 2001-12-25
- 发明人: Tetsuma Ikegami , Matsutaro Miyamoto , Hiroyuki Kawasaki
- 申请人: Tetsuma Ikegami , Matsutaro Miyamoto , Hiroyuki Kawasaki
- 优先权: JP9-187681 19970627; JP10-029160 19980127
- 主分类号: F04D1904
- IPC分类号: F04D1904
摘要:
A turbo-molecular pump of high safety and reliability has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump comprises a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section comprised by the stator and the rotor, and a constriction releasing structure for releasing constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.
公开/授权文献
- US20010016160A1 TURBO-MOLECULAR PUMP 公开/授权日:2001-08-23