发明授权
- 专利标题: Integrated circuitry and methods of forming circuitry
- 专利标题(中): 集成电路和形成电路的方法
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申请号: US09378433申请日: 1999-08-20
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公开(公告)号: US06333225B1公开(公告)日: 2001-12-25
- 发明人: Klaus Florian Schuegraf , Randhir P. S. Thakur
- 申请人: Klaus Florian Schuegraf , Randhir P. S. Thakur
- 主分类号: H01L218242
- IPC分类号: H01L218242
摘要:
In one aspect, the invention includes a method of forming circuitry comprising: a) forming a capacitor electrode over one region of a substrate: b) forming a capacitor dielectric layer proximate the electrode; c) forming a conductive diffusion barrier layer, the conductive diffusion barrier layer being between the electrode and the capacitor dielectric layer; d) forming a conductive plug over another region of the substrate, the conductive plug comprising a same material as the conductive diffusion barrier layer; and e) at least a portion of the conductive plug being formed simultaneously with the conductive diffusion barrier layer. In another aspect, the invention includes an integrated circuit comprising a capacitor and a conductive plug, the conductive plug and capacitor comprising a first common and continuous layer. In yet another aspect, the invention includes a circuit construction comprising: a) a substrate having a memory array region and a peripheral region that is peripheral to the memory array region; b) a capacitor construction over the memory array region of the substrate, the capacitor construction comprising a storage node, a capacitor dielectric layer and a cell plate layer; the capacitor dielectric layer being between the storage node and the cell plate layer; and c) an electrical interconnect over the peripheral region, the interconnect being electrically connected to the cell plate layer and extending between the cell plate layer and the substrate.
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