发明授权
US06335054B1 Air lock for introducing substrates to and/or removing them from a treatment chamber
有权
用于将基材引入和/或将其从处理室中移出的气锁
- 专利标题: Air lock for introducing substrates to and/or removing them from a treatment chamber
- 专利标题(中): 用于将基材引入和/或将其从处理室中移出的气锁
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申请号: US09631940申请日: 2000-08-03
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公开(公告)号: US06335054B1公开(公告)日: 2002-01-01
- 发明人: Tomas Baumecker , Helmut Grimm , Jürgen Henrich , Klaus Michael , Gert Rödling , Jürgen Ulrich
- 申请人: Tomas Baumecker , Helmut Grimm , Jürgen Henrich , Klaus Michael , Gert Rödling , Jürgen Ulrich
- 优先权: DE19807031 19980219; DE29802947U 19980219
- 主分类号: C23C1400
- IPC分类号: C23C1400
摘要:
In an air lock for continuous introduction into and/or removal of workpieces from spaces (1, 4) separated atmospherically, the individual substrates (3, 13) are transported through a transfer channel (24). At least one lock chamber (7a-7m) serving to accommodate the substrates (3, 13) is arranged movably in the transfer channel (24). During the substrate transport in the transfer channel (24), the lock chamber (7a-7m) is atmospherically separated both from the exterior (1) having normal pressure and from the coating chamber (4). The air lock (2) includes a carrousel lock which has a carrousel housing (24) and a lock chamber wheel (10). On the periphery in the lock chamber wheel (10) individual lock chambers (7a-7m) are provided, in which the workpieces (3, 13) to be brought into the chamber to be loaded (4) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (10), the substrates (3, 13) in the lock chambers (7a-7m) are transported from the coating station [sic; loading station] (A) to the transfer station (B) into the treatment chamber (4) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (3, 13) are removed from the transfer channels (7a-7m) by means of a transfer device (17′) and are available for further treatment in the treatment chamber (4).
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