发明授权
- 专利标题: Fully integrated thermal inkjet printhead having thin film layer shelf
- 专利标题(中): 具有薄膜层架的全集成热喷墨打印头
-
申请号: US09384817申请日: 1999-08-27
-
公开(公告)号: US06336714B1公开(公告)日: 2002-01-08
- 发明人: Naoto A. Kawamura , Colin C. Davis , Timothy L. Weber , Kenneth E. Trueba , John Paul Harmon , David R. Thomas
- 申请人: Naoto A. Kawamura , Colin C. Davis , Timothy L. Weber , Kenneth E. Trueba , John Paul Harmon , David R. Thomas
- 主分类号: B41J205
- IPC分类号: B41J205
摘要:
Described herein is a monolithic printhead formed using integrated circuit techniques. Thin film layers, including ink ejection elements, are formed on a top surface of a silicon substrate. The various layers are etched to provide conductive leads to the ink ejection elements. At least one ink feed hole is formed through the thin film layers for each ink ejection chamber. A trench is etched in the bottom surface of the substrate so that ink can flow into the trench and into each ink ejection chamber through the ink feed holes formed in the thin film layers. The trench completely etches away portions of the substrate near the ink feed holes so that the thin film layers form a shelf in the vicinity of the ink feed holes. In one embodiment, the shelf supports the ink ejection elements. An orifice layer is formed on the top surface of the thin film layers to define the nozzles and ink ejection chambers.
信息查询