Fully integrated thermal inkjet printhead having thin film layer shelf
    4.
    发明授权
    Fully integrated thermal inkjet printhead having thin film layer shelf 有权
    具有薄膜层架的全集成热喷墨打印头

    公开(公告)号:US06336714B1

    公开(公告)日:2002-01-08

    申请号:US09384817

    申请日:1999-08-27

    Abstract: Described herein is a monolithic printhead formed using integrated circuit techniques. Thin film layers, including ink ejection elements, are formed on a top surface of a silicon substrate. The various layers are etched to provide conductive leads to the ink ejection elements. At least one ink feed hole is formed through the thin film layers for each ink ejection chamber. A trench is etched in the bottom surface of the substrate so that ink can flow into the trench and into each ink ejection chamber through the ink feed holes formed in the thin film layers. The trench completely etches away portions of the substrate near the ink feed holes so that the thin film layers form a shelf in the vicinity of the ink feed holes. In one embodiment, the shelf supports the ink ejection elements. An orifice layer is formed on the top surface of the thin film layers to define the nozzles and ink ejection chambers.

    Abstract translation: 这里描述的是使用集成电路技术形成的单片打印头。 在硅衬底的顶表面上形成包括喷墨元件的薄膜层。 蚀刻各层以向墨喷射元件提供导电引线。 通过每个喷墨室的薄膜层形成至少一个供墨孔。 在衬底的底表面中蚀刻沟槽,使得油墨可以通过形成在薄膜层中的供墨孔流入沟槽并进入每个喷墨室。 沟槽在油墨供给孔附近完全蚀刻基板的部分,使得薄膜层在油墨供给孔附近形成搁板。 在一个实施例中,搁架支撑喷墨元件。 在薄膜层的顶表面上形成孔层以限定喷嘴和喷墨室。

    Inkjet printer printhead which eliminates unpredictable ink nucleation
variations
    5.
    发明授权

    公开(公告)号:US6126273A

    公开(公告)日:2000-10-03

    申请号:US70826

    申请日:1998-04-30

    Abstract: An inkjet printer printhead utilizes a substrate, an orifice layer, and a directionally biased electrostrictive polymer ink actuator disposed between the orifice layer and the substrate to eject ink from the printhead. The electrostrictive polymer ink actuator has a passivation layer disposed on the substrate, a first compliant electrode disposed at least on a first portion of the passivation layer, an electrostrictive polymer membrane disposed on a first area of the first compliant electrode, a passivation constraint disposed on a second portion of the passivation layer and a second area of the first compliant electrode effectively surrounding, in contact with, but not covering the electrostrictive polymer membrane in the first area of the first compliant electrode, and a second compliant electrode disposed on the passivation constraint which is disposed on the second portion of the passivation layer and the electrostrictive polymer membrane which is disposed on the first area of the first compliant electrode.

    Abstract translation: 喷墨打印机打印头使用设置在孔层和基板之间的基板,孔层和定向偏置的电致伸缩聚合物油墨致动器,以从打印头喷射墨。 所述电致伸缩聚合物油墨致动器具有设置在所述基板上的钝化层,至少设置在所述钝化层的第一部分上的第一柔顺电极,设置在所述第一柔性电极的第一区域上的电致伸缩聚合物膜, 钝化层的第二部分和第一顺应电极的第二区域有效地围绕第一柔性电极的第一区域中的电致伸缩聚合物膜接触而不覆盖电致伸缩聚合物膜,以及设置在钝化约束上的第二顺应电极 其设置在钝化层的第二部分和设置在第一顺应性电极的第一区域上的电致伸缩聚合物膜。

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