发明授权
- 专利标题: Single crystal pull-up apparatus
- 专利标题(中): 单晶上拉装置
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申请号: US09582918申请日: 2000-07-07
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公开(公告)号: US06338757B1公开(公告)日: 2002-01-15
- 发明人: Manabu Nishimoto , Masahiko Okui , Takayuki Kubo , Shingo Kizaki , Junji Horii
- 申请人: Manabu Nishimoto , Masahiko Okui , Takayuki Kubo , Shingo Kizaki , Junji Horii
- 优先权: JP10-10351 19980122
- 主分类号: C30B3500
- IPC分类号: C30B3500
摘要:
The present invention was achieved in order to provide an apparatus for pulling a single crystal with which a single crystal having a low density of grown-in defects called infrared scatterers, dislocation clusters or the like can be grown. In the apparatus for pulling a single crystal having a crucible to be charged with a melt, a heater arranged around the crucible, a straightening vane in the shape of a side surface of an inverted truncated cone or a cylinder surrounding a pulled single crystal and a heat shield plate for inhibiting the radiant heat from diverging upward in the chamber from the side surface of the pulled single crystal located in the vicinity of the melt surface are arranged.
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