发明授权
- 专利标题: Film forming method
- 专利标题(中): 成膜方法
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申请号: US09337557申请日: 1999-06-22
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公开(公告)号: US06338872B1公开(公告)日: 2002-01-15
- 发明人: Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
- 申请人: Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
- 优先权: JP7-242464 19950828; JP8-023093 19960116; JP8-023096 19960116
- 主分类号: C23C1600
- IPC分类号: C23C1600
摘要:
A film forming method is described using an apparatus with a plurality of vacuum chambers which communicate with each other via a connection, where the apparatus has one or more detachable treatment rooms and where the method includes continuously forming a plurality of films on a band-shaped substrate within the treatment rooms, while continuously moving the substrate through the treatment rooms. The treatment rooms within said desired vacuum chambers are replaced after forming the film for a predetermined period as a part of the film forming method.
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