发明授权
US06339297B1 Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus
失效
等离子体密度信息测量方法,用于测量等离子体密度信息的探针和等离子体密度信息测量装置
- 专利标题: Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus
- 专利标题(中): 等离子体密度信息测量方法,用于测量等离子体密度信息的探针和等离子体密度信息测量装置
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申请号: US09357773申请日: 1999-07-21
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公开(公告)号: US06339297B1公开(公告)日: 2002-01-15
- 发明人: Hideo Sugai , Seiichi Takasuga , Naoki Toyoda
- 申请人: Hideo Sugai , Seiichi Takasuga , Naoki Toyoda
- 优先权: JP10-208129 19980723; JP11-058636 19990305
- 主分类号: H01J724
- IPC分类号: H01J724
摘要:
A plasma density information measuring method capable of easily measuring the plasma density information over the long term, a probe for measuring the plasma density information, and a plasma density information measuring apparatus are disclosed. A measuring probe is set such that a tip end of a glass tube of the measuring probe is brought into contact with plasma PM to be measured. High-frequency power sent through a coaxial cable is supplied to the plasma PM from a loop antenna through a wall of the tube, and reflection power of the high-frequency power is received by the loop antenna to obtain a counter frequency variation of reflection coefficient of the high-frequency power. In the obtained reflection coefficient, a portion thereof in which the reflection coefficient is largely reduced is a peak at which strong absorption of high-frequency power is caused due to the plasma density. The plasma density can be obtained from the plasma absorption frequency.
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