公开(公告)号：US06744211B2

公开(公告)日：2004-06-01

申请号：US09972944

申请日：2001-10-10

申请人： Hideo Sugai ,  Seiichi Takasuga ,  Naoki Toyoda

发明人： Hideo Sugai ,  Seiichi Takasuga ,  Naoki Toyoda

IPC分类号： H01J724

CPC分类号： H01J37/32082 ,  H01J37/32935 ,  H05H1/0062

摘要： A plasma density information measuring method capable of easily measuring the plasma density information over the long term, a probe for measuring the plasma density information, and a plasma density information measuring apparatus are disclosed. A measuring probe is set such that a tip end of a glass tube of the measuring probe is brought into contact with plasma PM to be measured. High-frequency power sent through a coaxial cable is supplied to the plasma PM from a loop antenna through a wall of the tube, and reflection power of the high-frequency power is received by the loop antenna to obtain a counter frequency variation of reflection coefficient of the high-frequency power. In the obtained reflection coefficient, a portion thereof in which the reflection coefficient is largely reduced is a peak at which strong absorption of high-frequency power is caused due to the plasma density. The plasma density can be obtained from the plasma absorption frequency.

摘要翻译： 公开了能够容易地测量长期的等离子体密度信息的等离子体密度信息测量方法，用于测量等离子体密度信息的探针和等离子体密度信息测量装置。 测量探针被设置成使得测量探针的玻璃管的末端与待测量的等离子体PM接触。 通过同轴电缆发送的高频功率通过管壁从环形天线提供给等离子体PM，由环形天线接收高频功率的反射功率，以获得反射系数的反频率变化 的高频电源。 在获得的反射系数中，其反射系数大大降低的部分是由于等离子体密度而导致高频功率的强吸收的峰。 等离子体密度可以从等离子体吸收频率获得。

公开(公告)号：US06184623B2

公开(公告)日：2001-02-06

申请号：US09357849

申请日：1999-07-21

申请人： Hideo Sugai ,  Seiichi Takasuga ,  Naoki Toyoda

发明人： Hideo Sugai ,  Seiichi Takasuga ,  Naoki Toyoda

IPC分类号： H05B3126

CPC分类号： H01J37/32082 ,  H01J37/32935 ,  H01J37/3299

摘要： A plasma generating apparatus and a method for controlling plasma-generating high frequency power capable of appropriately and easily controlling plasma density over the long term are disclosed. Measuring high frequency power is supplied to plasma through a dielectric tube. Apart from a supply system of plasma-generating high frequency power, there is provided a plasma density information obtaining section having long lifetime no hot filament. The plasma density information obtaining section obtains the plasma density information by measuring a physical amount related to reflection or absorption of the high frequency power. An actually measured plasma density monitored by the plasma density information obtaining section from moment to moment and a target plasma density held in a plasma density setting section are compared. Based on this compared result, an impedance matching device is changed, and an impedance matching state between the electric source side and the plasma side, thereby appropriately controlling the generating high frequency power output from the high frequency electric source.

摘要翻译： 公开了一种等离子体产生装置和用于控制等离子体产生高频功率的方法，其能够适当且容易地控制长期的等离子体密度。 通过电介质管向等离子体提供测量高频功率。 除了等离子体产生高频功率的供应系统之外，还提供了一种具有长寿命的等离子体密度信息获取部分，不需要热丝。 等离子体密度信息获取部分通过测量与高频功率的反射或吸收相关的物理量来获得等离子体密度信息。 比较等离子体密度信息获取部分从瞬间到瞬时监测的实际测量的等离子体密度和等离子体密度设定部分中保持的目标等离子体密度。 基于该比较结果，阻抗匹配装置被改变，并且电源侧和等离子体侧之间的阻抗匹配状态，从而适当地控制从高频电源输出的产生高频功率。

公开(公告)号：US06339297B1

公开(公告)日：2002-01-15

申请号：US09357773

申请日：1999-07-21

申请人： Hideo Sugai ,  Seiichi Takasuga ,  Naoki Toyoda

发明人： Hideo Sugai ,  Seiichi Takasuga ,  Naoki Toyoda

IPC分类号： H01J724

CPC分类号： H01J37/32082 ,  H01J37/32935 ,  H05H1/0062

摘要： A plasma density information measuring method capable of easily measuring the plasma density information over the long term, a probe for measuring the plasma density information, and a plasma density information measuring apparatus are disclosed. A measuring probe is set such that a tip end of a glass tube of the measuring probe is brought into contact with plasma PM to be measured. High-frequency power sent through a coaxial cable is supplied to the plasma PM from a loop antenna through a wall of the tube, and reflection power of the high-frequency power is received by the loop antenna to obtain a counter frequency variation of reflection coefficient of the high-frequency power. In the obtained reflection coefficient, a portion thereof in which the reflection coefficient is largely reduced is a peak at which strong absorption of high-frequency power is caused due to the plasma density. The plasma density can be obtained from the plasma absorption frequency.

摘要翻译： 公开了能够容易地测量长期的等离子体密度信息的等离子体密度信息测量方法，用于测量等离子体密度信息的探针和等离子体密度信息测量装置。 测量探针被设置成使得测量探针的玻璃管的末端与待测量的等离子体PM接触。 通过同轴电缆发送的高频功率通过管壁从环形天线提供给等离子体PM，由环形天线接收高频功率的反射功率，以获得反射系数的反频率变化 的高频电源。 在获得的反射系数中，其反射系数大大降低的部分是由于等离子体密度而导致高频功率的强吸收的峰。 等离子体密度可以从等离子体吸收频率获得。