A manufacturing process including: forming a first insulating region on top of an active area; forming a tunnel region at the side of the first insulating region; depositing and defining a semiconductor material layer using a floating gate mask to form a floating gate region. The floating gate mask has an opening with an internal delimiting side extending at a preset distant from a corresponding outer delimiting side of the mask, so that the floating gate region forms inner a hole, and the tunnel region is defined, as regards its length, by the floating gate ask alone. The hole is filled with a dielectric material layer. The surface of the floating gate region is planarized, and an insulating region of dielectric material is made. A control gate region and conductive regions in the active area are then formed.