- 专利标题: Optical member inspecting apparatus and method of inspection thereof
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申请号: US09580044申请日: 2000-05-26
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公开(公告)号: US06351554B1公开(公告)日: 2002-02-26
- 发明人: Toshihiro Nakayama , Masato Hara , Masayuki Sugiura , Atsushi Kida
- 申请人: Toshihiro Nakayama , Masato Hara , Masayuki Sugiura , Atsushi Kida
- 优先权: JP7-164825 19950607; JP7-164826 19950607; JP7-164827 19950607; JP7-172911 19950615; JP7-175518 19950619; JP7-175519 19950619; JP7-184795 19950628; JP7-189844 19950703; JP7-189853 19950703; JP7-208398 19950724; JP7-208399 19950724; JP7-208400 19950724; JP7-221120 19950807; JP8-101834 19960401
- 主分类号: G06K900
- IPC分类号: G06K900
摘要:
An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
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